Patents by Inventor Nicolas A. Yang

Nicolas A. Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210029815
    Abstract: Some embodiments include a plasma system that includes a plasma chamber; an RF driver driving RF bursts into the plasma chamber with an RF frequency greater than 2 MHz; a nanosecond pulser driving pulses into the plasma chamber with a pulse repetition frequency a peak voltage, the pulse repetition frequency being less than the RF frequency and the peak voltage being greater than 2 kV; a first filter disposed between the RF driver and the plasma chamber; and a second filter disposed between the nanosecond pulser and the plasma chamber.
    Type: Application
    Filed: July 1, 2020
    Publication date: January 28, 2021
    Inventors: Christopher Bowman, Connor Liston, Nicolas A. Yang, Kenneth Miller, Ilia Slobodov, Timothy Ziemba