Abstract: A method of manufacturing a superconducting integrated circuit device includes providing a Josephson Junction (JJ) structure on a first structured superconducting layer arranged on a substrate. Forming a cover layer over the first structured superconducting layer, including forming a first component from a sacrificial material in a first region of the cover layer, the first component surrounding the JJ structure with at least a portion of a top surface of the JJ structure, facing away from the substrate, being uncovered by the sacrificial material, and forming a second component from a first dielectric material in a second region of the cover layer. A via is formed in the cover layer over a portion of the first structured superconducting layer. A second structured superconducting layer is formed overlaying the top surface of the JJ structure and the via. The sacrificial material is removed.

Abstract: A method of manufacturing a superconductive integrated circuit on a substrate includes forming a first superconductive layer of a superconductive material over the substrate. A Josephson junction (JJ) layer stack including a JJ barrier layer is formed over the first superconductive layer. The JJ layer stack is structured to form a JJ structure. The first superconductive layer is structured to form a structured first superconductive layer. A dielectric cover layer is formed over the JJ structure. The dielectric cover layer is structured a first time to expose an upper side of the JJ structure. A second superconductive layer of a superconductive material is formed over the dielectric cover layer. The second superconductive layer is structured to form a structured second superconductive layer.

Abstract: An electronic circuit includes a substrate and a superconducting electronic circuit unit which is constructed on the substrate. The superconducting electronic circuit unit includes a capacitor with parallel plates opposite one another and a crystalline capacitor dielectric arranged between the parallel plates.