Abstract: A turbomolecular pump bladed disc, comprising: a central hub configured to be rotated about an axis, the axis defining an axial direction; and one or more blades radially extending from the central hub; wherein each of the one or more blades has a cross-section that: tapers to a first point in a first direction, the first direction being parallel with the axial direction, tapers to a second point in a second direction, the second direction being parallel with the axial direction and opposite to the first direction; and is substantially a parallelogram in shape.

Abstract: An oil feed assembly for a vacuum pump comprises: an oil feeder located for feeding oil to one side of a bearing of the vacuum pump; an oil sump located on the one side of the bearing and configured to receive excess oil from the oil feeder; and a venting bypass conduit fluidly coupled with the oil sump and with another side of the bearing, the venting bypass conduit having an inlet located at an elevated position above a floor of the oil sump and configured to convey gas from the oil sump to the another side of the bearing. In this way, the venting bypass conduit provides an alternative path which allows gas within the oil sump to escape during pump-down while preventing oil within the oil sump from escaping with the gas travelling through the venting bypass conduit.

Abstract: An oil feed assembly for a vacuum pump comprises: an oil feeder located for feeding oil to one side of a bearing of the vacuum pump; an oil sump located on the one side of the bearing and configured to receive excess oil from the oil feeder; and a venting bypass conduit fluidly coupled with the oil sump and with another side of the bearing, the venting bypass conduit having an inlet located at an elevated position above a floor of the oil sump and configured to convey gas from the oil sump to the another side of the bearing. In this way, the venting bypass conduit provides an alternative path which allows gas within the oil sump to escape during pump-down while preventing oil within the oil sump from escaping with the gas travelling through the venting bypass conduit.

Abstract: A power supply system for vacuum pump comprising a power supply means to supply electrical energy to the vacuum pump for operation and energy storage means connected to the vacuum pump to store energy produced by the vacuum pump during ramp-down of the vacuum pump.