Patents by Inventor Nicole Rauwolf

Nicole Rauwolf has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTIPLE PARTICLE BEAM MICROSCOPE AND ASSOCIATED METHOD WITH AN IMPROVED FOCUS SETTING TAKING INTO ACCOUNT AN IMAGE PLANE TILT
    Publication number: 20220246388
    Abstract: A multiple particle beam microscope and an associated method set a desired focal plane with an optical resolution and set a telecentric irradiation with the plurality of the primary beams. A method determines an optimal setting plane, into which an object surface is brought. Further, a system provides an improved resolution and telecentric irradiation for a large number of primary beams. Targeted selection and targeted individual influencing of individual primary beams and/or a mechanism means for influencing the plurality of primary beams in collective fashion can be implemented.
    Type: Application
    Filed: January 24, 2022
    Publication date: August 4, 2022
    Inventors: Nicole Rauwolf, Nico Kaemmer, Michael Behnke, Ingo Mueller, Dirk Zeidler, Arne Thoma, Christof Riedesel, Gunther Scheunert
  • Particle beam system and method for operating a particle optical unit
    Patent number: 9991089
    Abstract: A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.
    Type: Grant
    Filed: October 19, 2017
    Date of Patent: June 5, 2018
    Assignee: Carl Zeiss Microscopy GmbH
    Inventors: Ingo Mueller, Nicole Rauwolf, Christof Riedesel, Thomas Kemen, Joerg Jacobi, Arne Thoma, Markus Doering, Dirk Zeidler, Juergen Kynast, Gerd Benner
  • PARTICLE BEAM SYSTEM AND METHOD FOR OPERATING A PARTICLE OPTICAL UNIT
    Publication number: 20180040454
    Abstract: A method for operating a multi-beam particle optical unit comprises includes providing a first setting of effects of particle-optical components, wherein a particle-optical imaging is characterizable by at least two parameters. The method also includes determining a matrix A, and determining a matrix S. The method further includes defining values of parameters which characterize a desired imaging, and providing a second setting of the effects of the components in such a way that the particle-optical imaging is characterizable by the parameters having the defined values.
    Type: Application
    Filed: October 19, 2017
    Publication date: February 8, 2018
    Inventors: Ingo Mueller, Nicole Rauwolf, Christof Riedesel, Thomas Kemen, Joerg Jacobi, Arne Thoma, Markus Doering, Dirk Zeidler, Juergen Kynast, Gerd Benner