Patents by Inventor Niek Roset

Niek Roset has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
    Publication number: 20070222906
    Abstract: An assembly including a conditioning system and an object movable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from the fluid outlet passages depending on a position of the object.
    Type: Application
    Filed: March 27, 2006
    Publication date: September 27, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Ronald Ham, Tjarko Van Empel, Herman Vogel, Niek Roset
  • Lithographic apparatus and method for conditioning an interior space of a device manufacturing apparatus
    Publication number: 20070071889
    Abstract: A lithographic apparatus is disclosed that includes a first gas shower configured to supply a first gas flow to an interior space of the apparatus, and a second gas shower configured to supply a second gas flow to the interior space of the apparatus, the gas showers configured to direct the first gas flow and the second gas flow at least partly towards each other. Also, a method for conditioning an interior space of a device manufacturing apparatus is provided that includes supplying a first conditioned gas flow and a second conditioned gas flow to the interior space, such that the first conditioned gas flow and the second conditioned gas flow are at least partly directed to each other.
    Type: Application
    Filed: September 29, 2005
    Publication date: March 29, 2007
    Inventors: Tjarko Van Empel, Ronald Van Der Ham, Niek Roset