Patents by Inventor Niels Driessen

Niels Driessen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation system and lithographic apparatus
    Publication number: 20070115445
    Abstract: The invention relates to a radiation system for generating a beam of radiation. The radiation system includes an extreme ultraviolet source constructed and arranged to generate extreme ultraviolet radiation, a contamination barrier constructed and arranged to trap contamination from the radiation source, and a temperature sensor constructed and arranged to sense a temperature of the contamination barrier.
    Type: Application
    Filed: November 21, 2006
    Publication date: May 24, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Wilhelmus Box, Derk Klunder, Maarten Marinus Johannes Van Herpen, Niels Driessen, Hendrikus Schimmel
  • Radiation system and lithographic apparatus
    Publication number: 20070115443
    Abstract: The invention relates to a radiation system for generating a beam of radiation. The radiation system includes an extreme ultraviolet source for generating extreme ultraviolet radiation, a contamination barrier for trapping contamination from the radiation source, and a temperature sensor for sensing a temperature of the contamination barrier.
    Type: Application
    Filed: November 23, 2005
    Publication date: May 24, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Wilhelmus Box, Derk Klunder, Maarten Wilhelmus Van Herpen, Niels Driessen