Patents by Inventor Niels Malkomes

Niels Malkomes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating installation
    Publication number: 20050145487
    Abstract: The invention relates to a coating installation comprising a recipient (1) which is divided into a cathode side (3) and a substrate side (4) by means of a screen (2). The cathode side (3) and the substrate side (4) respectively have a direct extraction outlet (10, 16) and a gas admission (8, 14). The gas admission (8) on the cathode side (3) is connected to a process gas source (9) and the gas admission (14) for the substrate side (4) is connected to a reactive gas source (15).
    Type: Application
    Filed: April 11, 2003
    Publication date: July 7, 2005
    Inventors: Michael Geisler, Albert Kastner, Bernd Szyszka, Andreas Pflug, Niels Malkomes
  • Method for regulating sputtering processes
    Patent number: 6797128
    Abstract: The invention relates to a method for regulating MF or HF sputtering processes, a harmonic analysis of the electrical discharge parameters being implemented and the MF or HF output and/or the reactive gas flow being regulated on the basis of the analysis results.
    Type: Grant
    Filed: July 29, 2002
    Date of Patent: September 28, 2004
    Assignee: Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung e.V.
    Inventors: Bernd Szyszka, Niels Malkomes