Abstract: A method of controlling a spectral property of a light beam includes directing a light beam to a lithography exposure apparatus configured to create a pattern on a wafer; receiving information representative of a spectral property of the light beam; receiving information representative of an optical imaging condition of the lithography exposure apparatus; estimating a characteristic value of the light beam based on the received spectral property information and the received optical imaging condition information; determining whether the estimated light beam characteristic value matches a target light beam characteristic value; and if it is determined that the estimated light beam characteristic value does not match the target light beam characteristic value, adjusting the spectral property of the light beam.

Abstract: A method of controlling a spectral property of a light beam includes directing a light beam to a lithography exposure apparatus configured to create a pattern on a wafer; receiving information representative of a spectral property of the light beam; receiving information representative of an optical imaging condition of the lithography exposure apparatus; estimating a characteristic value of the light beam based on the received spectral property information and the received optical imaging condition information; determining whether the estimated light beam characteristic value matches a target light beam characteristic value; and if it is determined that the estimated light beam characteristic value does not match the target light beam characteristic value, adjusting the spectral property of the light beam.

Abstract: A piezoelectric device comprising a first conductor, a conductive polymer member which contacts the first conductor, a piezoelectric polymer member which contacts the conductive polymer member but which is separated from the first conductor and which has been rendered piezoelectric by stretching and polarizing it while it is in contact with the conductive polymer member, and a second conductor which contacts the piezoelectric polymer member but which is separated from both the conductive polymer and the first conductor.

Abstract: A piezoelectric coaxial cable comprises a conductive polymer core comprising a high molecular weight polymeric material having conductive particles dispersed therein, a piezoelectric polymer layer surrounding the conductive polymer core, and an outer conductor surrounding the piezoelectric polymer layer. The high molecular weight polymeric material of the conductive polymer core comprises a polymer capable of being intimately bonded to the piezoelectric polymer.