Patents by Inventor Niichi Atsumi

Niichi Atsumi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device
    Patent number: 7098992
    Abstract: The light source unit includes a single wavelength oscillation light source, a light generating portion which has an optical modulator converting and emitting light from the light source into a pulse light, a light amplifying portion made up of an optical fiber group in which each fiber has a fiber amplifier to amplify the pulse light from the optical modulator, and a light amount controller. The light amount controller performs a step-by-step light amount control by individually turning on/off the light output of each fiber making up the optical fiber group, and a light amount control of controlling at least either of the frequency or the peak power of the emitted pulse light of the optical modulator.
    Type: Grant
    Filed: July 15, 2003
    Date of Patent: August 29, 2006
    Assignee: Nikon Corporation
    Inventors: Tomoko Ohtsuki, Soichi Owa, Niichi Atsumi, Masaaki Doi
  • Light source unit and wavelength stabilizing control method, exposure apparatus and exposure method, method of making exposure apparatus, and device manufacturing method and device
    Publication number: 20040012844
    Abstract: The light source unit (16) comprises a single wavelength oscillation light source (160A), a light generating portion (160) which has an optical modulator (160C) converting and emitting light from the light source into a pulse light, a light amplifying portion (161) made up of an optical fiber group that each has a fiber amplifier to amplify the pulse light from the optical modulator, and a light amount controller (16C). The light amount controller (16C) performs a step-by-step light amount control by individually turning on/off the light output of each fiber making up the optical fiber group, and a light amount control of controlling at least either of the frequency or the peak power of the emitted pulse light of the optical modulator.
    Type: Application
    Filed: July 15, 2003
    Publication date: January 22, 2004
    Applicant: Nikon Corporation
    Inventors: Tomoko Ohtsuki, Soichi Owa, Niichi Atsumi, Masaaki Doi