Patents by Inventor Niklas Bondestram

Niklas Bondestram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Active pulse monitoring in a chemical reactor
    Patent number: 7063981
    Abstract: A method and apparatus for determining changes in a supply system, designed to supply repeated pulses of a vapor phase reactant to a reaction chamber is disclosed. One embodiment involves providing the reactant source, and a gas conduit to connect the reactant source to the reaction chamber, a valve positioned in communication with the reactant source such that switching of the valve induces vapor phase reactant pulses from the reactant source to the reaction chamber and a sensor positioned in communication with the reactant source and configured to provide a signal indicative of a characteristic parameter of the reactant pulse as a function of time. A curve is derived from the signal and the shape of the curve is monitored to determine changes in the curve shape over time during subsequent pulses.
    Type: Grant
    Filed: January 30, 2002
    Date of Patent: June 20, 2006
    Assignee: ASM International N.V.
    Inventors: Niklas Bondestram, Menso Hendriks