Patents by Inventor Nikolai Eberhardt

Nikolai Eberhardt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8207748
    Abstract: An apparatus (10) for contactless measurement of sheet charge density and mobility includes a microwave source (16), a circular waveguide (50) for transmitting microwave power to a sample (59), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector (18) for detecting the forward microwave power, a second detector (23) for detecting the microwave power reflected from the sample, and a third detector (95) for detecting the Hall effect power. An automatic positioning subsystem (700) is also provided for allowing automatic positioning of a wafer (59) within the test apparatus (10). The positioning system (700) includes a first end effector (706) and a rotator-lifter (704).
    Type: Grant
    Filed: August 10, 2005
    Date of Patent: June 26, 2012
    Assignee: Lehighton Electronics, Inc.
    Inventors: Austin Blew, Michael W. Bronko, Steven C. Murphy, Danh Nguyen, Nikolai Eberhardt, Jerome C. Licini, William Zuidervliet
  • Publication number: 20090295407
    Abstract: An apparatus (10) for contactless measurement of sheet charge density and mobility includes a microwave source (16), a circular waveguide (50) for transmitting microwave power to a sample (59), such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector (18) for detecting the forward microwave power, a second detector (23) for detecting the microwave power reflected from the sample, and a third detector (95) for detecting the Hall effect power. An automatic positioning subsystem (700) is also provided for allowing automatic positioning of a wafer (59) within the test apparatus (10). The positioning system (700) includes a first end effector (706) and a rotator-lifter (704).
    Type: Application
    Filed: August 10, 2005
    Publication date: December 3, 2009
    Applicant: LEHIGHTON ELECTRONICS INC.
    Inventors: Austin Blew, Michael Bronco, Steven Murphy, Danh Nguyen, Nikolai Eberhardt, Jerom Licini, William Zuidervliet
  • Patent number: 7109724
    Abstract: An apparatus for contactless measurement of sheet charge density and mobility includes a microwave source, waveguide, first, second and third detectors, and an eccentric bore mount for adjusting the sample. A circular waveguide, carrying the TE11 mode, terminates by the sample behind which a short is located. A magnetic field is applied perpendicular to the plane of the sample, and an incident TE11 wave causes an ordinary reflected wave and a reflected wave caused by the Hall effect. A first detector measures the ordinary reflected wave, which has the same polarization as the incident wave. A seperate probe measures the reflected wave caused by the Hall effect, whose polarization is perpendicular to the former. This reflected wave is detected, and the output combined with an attenuated; phase shifted, portion of the forward power at a single detector, to eliminate by destructive interference any spurious incident signal at said detector.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: September 19, 2006
    Assignee: Lehighton Electronics, Inc.
    Inventors: Nikolai Eberhardt, Jerome C. Licini, Steven C. Murphy, William Zuidervliet
  • Publication number: 20050253594
    Abstract: An apparatus for contactless measurement of sheet charge density and mobility includes a microwave source, a circular waveguide for transmitting microwave power to a sample, such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector for detecting the forward microwave power, a second detector for detecting the microwave power reflected from the sample, and a third detector for detecting the Hall effect power. A circular waveguide, carrying only the TE11 mode, is terminated by the sample behind which an short circuit is located. Perpendicular to the plane of the sample (and along the axis of the circular waveguide), a magnetic field is applied. In this configuration, a given incident TE11 wave will cause two reflected waves. One is the ordinary reflected wave in the same polarization as the incident one. A detector is provided to measure this reflected power. The other reflected wave is caused by the Hall effect.
    Type: Application
    Filed: August 11, 2004
    Publication date: November 17, 2005
    Inventors: Nikolai Eberhardt, Jerome Licini, Steven Murphy, William Zuidervliet
  • Patent number: 6791339
    Abstract: An apparatus for contactless measurement of carrier concentration and mobility includes a microwave source, a circular waveguide for transmitting microwave radiation to a sample, such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector for detecting the forward microwave power, a second detector for detecting the microwave power reflected from the sample, and a third detector for detecting the Hall effect power. A circular waveguide, carrying only the TE11 mode, is terminated by the sample behind which a short is located. Perpendicular to the plane of the sample (and along the axis of the circular waveguide), a magnetic field is applied. In this configuration, a given incident TE11 wave will cause two reflected waves. One is the ordinary reflected wave in the same polarization as the incident one. A detector is provided to measure this reflected radiation. The other reflected wave is caused by the Hall effect.
    Type: Grant
    Filed: May 1, 2002
    Date of Patent: September 14, 2004
    Assignee: Lehighton Electronics, Inc.
    Inventors: Jerome C. Licini, Nikolai Eberhardt
  • Publication number: 20030016032
    Abstract: An apparatus for contactless measurement of carrier concentration and mobility includes a microwave source, a circular waveguide for transmitting microwave radiation to a sample, such as a semiconductor wafer or panel for flat panel displays, at a measurement location, a first detector for detecting the forward microwave power, a second detector for detecting the microwave power reflected from the sample, and a third detector for detecting the Hall effect power. A circular waveguide, carrying only the TE11 mode, is terminated by the sample behind which a short is located. Perpendicular to the plane of the sample (and along the axis of the circular waveguide), a magnetic field is applied. In this configuration, a given incident TE11 wave will cause two reflected waves. One is the ordinary reflected wave in the same polarization as the incident one. A detector is provided to measure this reflected radiation. The other reflected wave is caused by the Hall effect.
    Type: Application
    Filed: May 1, 2002
    Publication date: January 23, 2003
    Inventors: Jerome C. Licini, Nikolai Eberhardt
  • Patent number: 4817000
    Abstract: Automatic guided vehicle system for guiding a driverless vehicle over a predetermined path of travel without any tracks, wires or the like. The vehicle is provided with an active optical navigation section for determining vehicle position and bearing by scanning plural beacons distributed within the zone of travel of the vehicle, a passive ground navigation section including a gyrocompass for measuring changes in bearing of the vehicle and a wheel encoder for measuring distance traveled by the vehicle's steering wheel. Memory onboard the vehicle contains a series of path vectors which define a predetermined path of travel for the vehicle. The ground navigation section updates vehicle position and bearing as determined by the optical navigation section.
    Type: Grant
    Filed: March 10, 1986
    Date of Patent: March 28, 1989
    Assignee: SI Handling Systems, Inc.
    Inventor: Nikolai Eberhardt
  • Patent number: 4425505
    Abstract: A continuously measuring on-line production gage calibrated to indicate bar weight per foot and unaffected by typical reinforcing bar shape variability utilizes two radiation gages with their measuring axes separated by 90 degrees and offset by 45 degrees from the rib plane of the reinforcing bar. Each gage is equipped with a shutter which may be adjusted electrically to simulate any required weight per foot standard and with the gage zeroing on a predetermined shutter setting, the shutter automatically opens and radiation detector signal variations from the zero point are amplified, linearized, averaged, and scaled electronically to produce a percent weight per foot output signal. Summation of detected radiation is also performed through use of optical fibers.
    Type: Grant
    Filed: April 15, 1981
    Date of Patent: January 10, 1984
    Assignee: Bethlehem Steel Corporation
    Inventors: Duane T. Jones, Nikolai Eberhardt