Patents by Inventor Nikolai Nikolaevich KALNIN

Nikolai Nikolaevich KALNIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus with concentric pumping for multiple pressure regimes
    Patent number: 10559451
    Abstract: An exhaust module for a substrate processing apparatus having a body, a pumping ring, and a symmetric flow valve, is disclosed herein. The body has a first and second vacuum pump opening formed therethrough. The pumping ring is positioned in the body over both the first and second vacuum pump openings. The pumping ring includes a substantially ring shaped body having a top surface, a bottom surface, and an opening. The top surface has one or more through holes formed therein, arranged in a pattern concentric with the first vacuum pump opening. The bottom surface has a fluid passage formed therein, interconnecting each of the one or more through holes. The opening is formed in the substantially ring shaped body, substantially aligned with the vacuum pump opening. The symmetric flow valve is positioned in the body over the pumping ring and movable between a raised position and a lowered position.
    Type: Grant
    Filed: February 15, 2017
    Date of Patent: February 11, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Nikolai Nikolaevich Kalnin, Toan Q. Tran, Dmitry Lubomirsky
  • APPARATUS WITH CONCENTRIC PUMPING FOR MULTIPLE PRESSURE REGIMES
    Publication number: 20180233327
    Abstract: An exhaust module for a substrate processing apparatus having a body, a pumping ring, and a symmetric flow valve, is disclosed herein. The body has a first and second vacuum pump opening formed therethrough. The pumping ring is positioned in the body over both the first and second vacuum pump openings. The pumping ring includes a substantially ring shaped body having a top surface, a bottom surface, and an opening. The top surface has one or more through holes formed therein, arranged in a pattern concentric with the first vacuum pump opening. The bottom surface has a fluid passage formed therein, interconnecting each of the one or more through holes. The opening is formed in the substantially ring shaped body, substantially aligned with the vacuum pump opening. The symmetric flow valve is positioned in the body over the pumping ring and movable between a raised position and a lowered position.
    Type: Application
    Filed: February 15, 2017
    Publication date: August 16, 2018
    Inventors: Nikolai Nikolaevich KALNIN, Toan Q. TRAN, Dmitry LUBOMIRSKY