Patents by Inventor Nikolai Nikolaevich Salaschenko

Nikolai Nikolaevich Salaschenko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTILAYER MIRROR AND LITHOGRAPHIC APPARATUS
    Publication number: 20110080573
    Abstract: A multilayer mirror is constructed and arranged to reflect radiation haying a wavelength in the range of 2-8 nm. The multilayer mirror has alternating layers selected from the group consisting of: Cr and Sc layers, Cr and C layers, C and B4C layers, U and B4C layers, Th and B4C layers, C and B9C layers, La and B9C layers, U and B9C layers, Th and B9C layers, La and B layers, C and B layers. U and B layers, and Th and B layers.
    Type: Application
    Filed: May 20, 2009
    Publication date: April 7, 2011
    Applicant: ASML Netherlands B.V.
    Inventors: Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Leonid Aizikovitch Sjmaenok, Nikolai Nikolaevich Salaschenko