Patents by Inventor Nikolay Sherbak

Nikolay Sherbak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11921297
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.
    Type: Grant
    Filed: February 28, 2022
    Date of Patent: March 5, 2024
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Matthew Derstine, Andrey Stepanov, Nikolay Sherbak
  • Publication number: 20220187610
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.
    Type: Application
    Filed: February 28, 2022
    Publication date: June 16, 2022
    Inventors: Ilya Bezel, Matthew Derstine, Andrey Stepanov, Nikolay Sherbak
  • Patent number: 11262591
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: March 1, 2022
    Assignee: KLA Corporation
    Inventors: Ilya Bezel, Matthew Derstine, Andrey Stepanov, Nikolay Sherbak
  • Publication number: 20200150445
    Abstract: A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.
    Type: Application
    Filed: November 9, 2018
    Publication date: May 14, 2020
    Inventors: Ilya Bezel, Matthew Derstine, Andrey Stepanov, Nikolay Sherbak