Patents by Inventor NIKON METROLOGY NV

NIKON METROLOGY NV has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20150355327
    Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
    Type: Application
    Filed: March 15, 2013
    Publication date: December 10, 2015
    Applicants: Nikon Metrology NV, Nikon Corporation
    Inventors: Nikon Corporation, Nikon Metrology NV
  • Publication number: 20150268344
    Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
    Type: Application
    Filed: March 15, 2013
    Publication date: September 24, 2015
    Applicants: NIKON METROLOGY NV, NIKON CORPORATION
    Inventors: NIKON CORPORATION, NIKON METROLOGY NV
  • Publication number: 20150177379
    Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.
    Type: Application
    Filed: March 15, 2013
    Publication date: June 25, 2015
    Applicants: NIKON METROLOGY NV, NIKON CORPORATION
    Inventors: NIKON CORPORATION, NIKON METROLOGY NV
  • Publication number: 20130202727
    Abstract: There is provided a measuring apparatus including: an imaging optical system configured to form an image of an object to be measured; and an imaging section including a transmissive member which is arranged in the vicinity of an image plane of the imaging optical system to be inclined with respect an optical axis of the imaging optical system. The imaging optical system includes a first optical member which is non-coaxial with respect to the optical axis.
    Type: Application
    Filed: February 6, 2013
    Publication date: August 8, 2013
    Applicants: NIKON METROLOGY NV, NIKON CORPORATION
    Inventors: NIKON CORPORATION, NIKON METROLOGY NV