Patents by Inventor Nilesh Shantaram Doke

Nilesh Shantaram Doke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for CMP with variable down-force adjustment
    Patent number: 7344987
    Abstract: The present invention relates to a method for performing chemical mechanical polishing. A high down-force step is performed. A low down-force step is performed. At least one of the down-force steps is modified, based on if one of the down-force steps exceeds an acceptable tolerance associated therewith. Other systems and methods are also disclosed.
    Type: Grant
    Filed: June 2, 2006
    Date of Patent: March 18, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Yaojian Leng, Nilesh Shantaram Doke, Stanley Monroe Smith