Abstract: The present invention initially relates to a method for generating an image of a sample, said image being pieced together from a plurality of individual microscope images. A microscope is provided, for which a measurement value of a twist angle (?) present between an image recording unit of the microscope and an object stage of the microscope and a measurement accuracy of this measurement value are known. There is a recording of a first individual microscope image of the sample using the microscope and a displacement of the image recording unit and the sample-supporting object stage relative to one another, whereupon a second individual microscope image (02) of the sample is recorded using the microscope. A search region is determined in the second or first individual microscope image, an overlap region between the individual microscope images being expected in said search region.

Abstract: The invention relates to a method for determining the thickness and refractive index of a layer (6) on a substrate (26). The layer (6) having a layer boundary surface (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26).

Abstract: A method for determining a height position of an object at of using a microscope which images using a point-spread function along a z-direction (height direction), comprising the steps of imaging the object in the far field and determining a far-field intensity, calculating a maximum intensity expected by multiplying the far-field intensity by a scaling factor, partially confocally imaging the object with the focus in the z-direction within the depth-of-field range, and determining a partially-confocal intensity of the imaging, calculating the intensity of the point-spread function (at the first location) by forming a difference between the partially-confocal intensity and a product of the far-field intensity and a predefined combination factor, calculating the z-coordinate of the focus at a point-spread function maximum, using a previously-known form of the point spread function, its calculated intensity, and the calculated expected maximum intensity, and using the z-coordinate as the height position of the

Abstract: A microscopic imaging method, includes illuminating a specimen with illumination radiation and capturing detection radiation along a detection axis. The detection radiation is caused by the illumination radiation, at a first time as a wide-field signal and at a second time as a composite signal. The composite signal is formed by a superposition of a confocal image and a wide-field image; extracting the confocal image by subtracting the wide-field signal from the composite signal, wherein a correction factor is used. A current correction factor is ascertained for each executed imaging and/or for each imaged specimen (1) and the confocal image is extracted using the respective current correction factor.

Abstract: The present invention initially relates to a method for generating an image of a sample, said image being pieced together from a plurality of individual microscope images. A microscope is provided, for which a measurement value of a twist angle (?) present between an image recording unit of the microscope and an object stage of the microscope and a measurement accuracy of this measurement value are known. There is a recording of a first individual microscope image of the sample using the microscope and a displacement of the image recording unit and the sample-supporting object stage relative to one another, whereupon a second individual microscope image (02) of the sample is recorded using the microscope. A search region is determined in the second or first individual microscope image, an overlap region between the individual microscope images being expected in said search region.

Abstract: The invention relates to a method for determining the thickness and refractive index of a layer (6) on a substrate (26). The layer (6) having a layer boundary surface (30) facing the substrate (26) and a layer top side (28) facing away from the substrate (26).

Abstract: A method for determining a height position of an object at of using a microscope which images using a point-spread function along a z-direction (height direction), comprising the steps of imaging the object in the far field and determining a far-field intensity, calculating a maximum intensity expected by multiplying the far-field intensity by a scaling factor, partially confocally imaging the object with the focus in the z-direction within the depth-of-field range, and determining a partially-confocal intensity of the imaging, calculating the intensity of the point-spread function (at the first location) by forming a difference between the partially-confocal intensity and a product of the far-field intensity and a predefined combination factor, calculating the z-coordinate of the focus at a point-spread function maximum, using a previously-known form of the point spread function, its calculated intensity, and the calculated expected maximum intensity, and using the z-coordinate as the height position of the

Abstract: The invention relates to a microscope (12) having an objective interchange apparatus (22) comprising a holder (21) for receiving a number of objectives (1) at respective holder positions (21.n) and an objective receptacle (11) which is configured for receiving an objective (1) and is arranged in an optical beam path (13) of the microscope (12). The microscope (12) is characterized by an objective delivery device (20) which is configured for transporting in each case a selected objective (1) having an objective retainer (3) between its holder position (21.n), which is delivered to a transfer position (ÜP), and the objective receptacle (11), wherein the objective receptacle (11) remains in the optical beam path (13) during the transport of the objective (1).

Abstract: A confocal microscope and an associated method for determining a topography of a sample by implementing a correlative spinning disk microscopy is provided. The method includes placing a sample on an object stage of the microscope. Either the object stage is moved vertically to determine the topography of the sample, while first and second images of the sample are captured in an alternating manner. A vertical focus position is stored as metadata for each image. Two first or second images are interpolated to give an intermediate image. A confocal image for a defined vertical position is generated by calculating the intermediate image with the second or first image at the position.

Abstract: A method for determining a height position of an object at of using a microscope which images using a point-spread function along a z-direction (height direction), comprising the steps of imaging the object in the far field and determining a far-field intensity, calculating a maximum intensity expected by multiplying the far-field intensity by a scaling factor, partially confocally imaging the object with the focus in the z-direction within the depth-of-field range, and determining a partially-confocal intensity of the imaging, calculating the intensity of the point-spread function (at the first location) by forming a difference between the partially-confocal intensity and a product of the far-field intensity and a predefined combination factor, calculating the z-coordinate of the focus at a point-spread function maximum, using a previously-known form of the point spread function, its calculated intensity, and the calculated expected maximum intensity, and using the z-coordinate as the height position of the

Abstract: A microscopic imaging method, includes illuminating a specimen with illumination radiation and capturing detection radiation along a detection axis. The detection radiation is caused by the illumination radiation, at a first time as a wide-field signal and at a second time as a composite signal. The composite signal is formed by a superposition of a confocal image and a wide-field image; extracting the confocal image by subtracting the wide-field signal from the composite signal, wherein a correction factor is used. A current correction factor is ascertained for each executed imaging and/or for each imaged specimen (1) and the confocal image is extracted using the respective current correction factor.

Abstract: A confocal microscope for determination of a layer thickness comprises: a focus adjusting device configured to adjust a relative displacement between a focus position of the illumination light and a specimen position along an optical axis, wherein measurement signals belonging to different settings of the focus adjusting device can be recorded; an evaluation device for determining a specimen layer thickness as follows: determine intensity band positions of two intensity bands in a measurement graph recorded by a light measuring device, the measurement graph indicating a light intensity in dependence of the focus position; determine a layer thickness on the basis of a positional difference between the intensity band positions; and determine the layer thickness using a mathematical model which describes for overlapping intensity bands a dependence of the intensity band positions on a light wavelength and the layer thickness, considering interference of the illumination light at the layer.

Abstract: The invention relates to a light microscope comprising a polychromatic light source for emitting illumination light in the direction of a sample, focussing means for focussing illumination light onto the sample, wherein the focussing means, for generating a depth resolution, have a longitudinal chromatic aberration, and a detection device, which comprises a two-dimensional array of detector elements, for detecting sample light coming from the sample. According to the invention, the light microscope is characterized in that, for detecting both confocal portions and non-confocal portions of the sample light, a beam path from the sample to the detection device is free of elements for completely masking out non-confocal portions. In addition, the invention relates to a method for image recording using a light microscope.

Abstract: A confocal microscope for determination of a layer thickness comprises: a focus adjusting device configured to adjust a relative displacement between a focus position of the illumination light and a specimen position along an optical axis, wherein measurement signals belonging to different settings of the focus adjusting device can be recorded; an evaluation device for determining a specimen layer thickness as follows: determine intensity band positions of two intensity bands in a measurement graph recorded by a light measuring device, the measurement graph indicating a light intensity in dependence of the focus position; determine a layer thickness on the basis of a positional difference between the intensity band positions; and determine the layer thickness using a mathematical model which describes for overlapping intensity bands a dependence of the intensity band positions on a light wavelength and the layer thickness, considering interference of the illumination light at the layer.

Abstract: The invention relates to a microscope (12) having an objective interchange apparatus (22) comprising a holder (21) for receiving a number of objectives (1) at respective holder positions (21.n) and an objective receptacle (11) which is configured for receiving an objective (1) and is arranged in an optical beam path (13) of the microscope (12). The microscope (12) is characterized by an objective delivery device (20) which is configured for transporting in each case a selected objective (1) having an objective retainer (3) between its holder position (21.n), which is delivered to a transfer position (ÜP), and the objective receptacle (11), wherein the objective receptacle (11) remains in the optical beam path (13) during the transport of the objective (1).

Abstract: The invention relates to a confocal microscope and a method for determining a topography of a sample by means of correlative spinning disk microscopy. An object stage and/or a focus drive is moved vertically in order to determine the topography, while first and second images of a sample placed on the object stage are captured in an alternating manner. A vertical focus position is stored as metadata for each image. Two first or second images are interpolated to give an intermediate image. A confocal image for a defined vertical position is generated by calculating the intermediate image with the second or first image at the position.

Abstract: The invention relates to a device for microscopy, with at least one light source for providing illumination light, with a detection unit for detecting light radiated back from a sample, with a microscopy optical unit for guiding illumination light onto the sample and for guiding light radiated back from the sample in the direction of the detection unit and with, arranged in an illumination beam path, an excitation mask (40) for providing structured illumination. The device is characterized in that the excitation mask is a spatially structured filter, which is transparent to light with a first physical property and which impresses spatial structure onto light with a second physical property that is different from the first physical property. The invention moreover relates to a method for microscopy.

Abstract: Examination of a microscopic specimen is described. Height information for a respective plurality of lateral regions of the specimen is obtained from each of multiple specimen recordings, in which the height information of each specimen recording is limited to a respective height measurement range and the height measurement ranges of different specimen recordings are different. An overall image is calculated from the specimen recordings, in which overall image height information of the different specimen recordings is combined.

Abstract: Examination of a microscopic specimen is described. Height information for a respective plurality of lateral regions of the specimen is obtained from each of multiple specimen recordings, in which the height information of each specimen recording is limited to a respective height measurement range and the height measurement ranges of different specimen recordings are different. An overall image is calculated from the specimen recordings, in which overall image height information of the different specimen recordings is combined.

Abstract: The invention relates to a device for microscopy, with at least one light source for providing illumination light, with a detection unit for detecting light radiated back from a sample, with a microscopy optical unit for guiding illumination light onto the sample and for guiding light radiated back from the sample in the direction of the detection unit and with, arranged in an illumination beam path, an excitation mask (40) for providing structured illumination. The device is characterized in that the excitation mask is a spatially structured filter, which is transparent to light with a first physical property and which impresses spatial structure onto light with a second physical property that is different from the first physical property. The invention moreover relates to a method for microscopy.