Abstract: An efficient method of scanning is provided that may be used for treatment, analysis, inspection and testing physical objects and spaces. High precision, resolution and throughput of scanning are achieved by employing a dual motion of probing devices and scanned objects. A probing device spins with high speed about an axis of spinning directed towards a scanned object. Concurrently, the spinning axis is set in a relatively slow motion with respect to the scanned object. Both the spinning of the probing and the motion of the spin axis are implemented in a controlled and predetermined way to achieve objectives of scanning. Accordingly, arbitrary large and shaped objects may be efficiently scanned with high precision and throughput.

Abstract: Disclosed are a method and an apparatus for inspection of workpieces and products having curved and, in particular, spherical surfaces. The method is based on scanning inspected objects with a narrow probing beam of electromagnetic radiation and concurrently measuring the radiation scattered on the surface. The method and apparatus improve the detectability of features and imperfections on inspected surfaces by providing invariable parameters and conditions of scanning, robust mechanical stability of scanning systems, high positioning accuracy of the probing electromagnetic beam and efficient collection of the scattered radiation. The apparatus allows surface defect classification, determining defect dimensions and convenient automation of inspection.

Abstract: A high throughput and high resolution method for characterizing objects is based on scanning their surfaces with a fast spinning probing beam of electromagnetic radiation concurrently with relatively slow object motion. A characterization apparatus comprises a guiding system that directs a primary beam of electromagnetic radiation onto the surface of a characterized object. An actuator repositions the object. An analytical system measures characteristic parameters of secondary electromagnetic radiation instigated by the primary beam of electromagnetic radiation from the object. A register system records the measured characteristic parameters synchronously with instantaneous coordinates of beam spots at which the secondary electromagnetic radiation is instigated. A compact system of probing beam spinning enables fabrication of inexpensive characterization tools with small dimensions.

Abstract: Disclosed are a method and an apparatus for inspection of workpieces and products having curved and, in particular, spherical surfaces. The method is based on scanning inspected objects with a narrow probing beam of electromagnetic radiation and concurrently measuring the radiation scattered on the surface. The method and apparatus improve the detectability of features and imperfections on inspected surfaces by providing invariable parameters and conditions of scanning, robust mechanical stability of scanning systems, high positioning accuracy of the probing electromagnetic beam and efficient collection of the scattered radiation. The apparatus allows surface defect classification, determining defect dimensions and convenient automation of inspection.

Abstract: An apparatus for analyzing technological surfaces is provided. The apparatus has a laser scanner, an electronic control and data processing system and a transport system for setting the scanner and analyzed surfaces in a slow relative motion. The scanner is implemented in a compact form and includes a spinning hollow shaft that carries a laser module and a collector of laser radiation scattered on analyzed surfaces. The collected radiation is transmitted to a photodetector through the bore in the hollow shaft. The design of the scanner enables cost effective characterization of analyzed surfaces with high throughput and precision. The portability of the analyzer allows its integration into production equipment for in-situ product inspection or equipment self-diagnostics.

Abstract: A high throughput and high resolution method for characterizing objects is based on scanning their surfaces with a fast spinning probing beam of electromagnetic radiation concurrently with relatively slow object motion. A characterization apparatus comprises a guiding system that directs a primary beam of electromagnetic radiation onto the surface of a characterized object. An actuator repositions the object. An analytical system measures characteristic parameters of secondary electromagnetic radiation instigated by the primary beam of electromagnetic radiation from the object. A register system records the measured characteristic parameters synchronously with instantaneous coordinates of beam spots at which the secondary electromagnetic radiation is instigated. A compact system of probing beam spinning enables fabrication of inexpensive characterization tools with small dimensions.