Patents by Inventor NINAD VIJAY SONJE

NINAD VIJAY SONJE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE RETAINING APPARATUS, SYSTEM INCLUDING THE APPARATUS, AND METHOD OF USING SAME
    Publication number: 20240133035
    Abstract: A substrate retaining apparatus, a load lock assembly comprising the substrate retaining apparatus, and a system including the substrate retaining apparatus are disclosed. The substrate retaining apparatus can include at least one sidewall and one or more heat shields. One or more of the at least one sidewall can include a cooling fluid conduit to facilitate cooling of substrates retained by the substrate retaining apparatus. Additionally or alternatively, one or more of the at least one sidewall can include a gas conduit to provide gas to a surface of a retained substrate.
    Type: Application
    Filed: January 3, 2024
    Publication date: April 25, 2024
    Inventors: Shiva K.T. Rajavelu Muralidhar, Sam Kim, Jeffrey Barrett Robinson, James King Wilson, JR., Ninad Vijay Sonje
  • Substrate retaining apparatus, system including the apparatus, and method of using same
    Patent number: 11885023
    Abstract: A substrate retaining apparatus, a load lock assembly comprising the substrate retaining apparatus, and a system including the substrate retaining apparatus are disclosed. The substrate retaining apparatus can include at least one sidewall and one or more heat shields. One or more of the at least one sidewall can include a cooling fluid conduit to facilitate cooling of substrates retained by the substrate retaining apparatus. Additionally or alternatively, one or more of the at least one sidewall can include a gas conduit to provide gas to a surface of a retained substrate.
    Type: Grant
    Filed: September 26, 2019
    Date of Patent: January 30, 2024
    Assignee: ASM IP Holding B.V.
    Inventors: Shiva K. T. Rajavelu Muralidhar, Sam Kim, Jeffrey Barrett Robinson, James King Wilson, Jr., Ninad Vijay Sonje
  • SUBSTRATE RETAINING APPARATUS, SYSTEM INCLUDING THE APPARATUS, AND METHOD OF USING SAME
    Publication number: 20200102653
    Abstract: A substrate retaining apparatus, a load lock assembly comprising the substrate retaining apparatus, and a system including the substrate retaining apparatus are disclosed. The substrate retaining apparatus can include at least one sidewall and one or more heat shields. One or more of the at least one sidewall can include a cooling fluid conduit to facilitate cooling of substrates retained by the substrate retaining apparatus. Additionally or alternatively, one or more of the at least one sidewall can include a gas conduit to provide gas to a surface of a retained substrate.
    Type: Application
    Filed: September 26, 2019
    Publication date: April 2, 2020
    Inventors: SHIVA K.T. RAJAVELU MURALIDHAR, SAM KIM, JEFFREY BARRETT ROBINSON, JAMES KING WILSON, JR., NINAD VIJAY SONJE