Abstract: Improved resistance to electrical instability of opto-isolators subjected to large stand-off voltages is obtained by coating the semiconductor light sensing element with a high resistivity layer of amorphous silicon while leaving most of the surface PN junction perimeter and nearby regions free of metal. The amorphous silicon prevents mobile ions in the encapsulation, which are driven to the detector surface by the stand-off voltage, from inverting or modulating the conductivity of the detector surface and causing instability. The amorphous silicon also makes it possible to leave most of the light sensitive PN junctions and nearby regions free of metal, thereby simplifying design of complex IC detector chips and increasing sensitivity.