Patents by Inventor Nithin Thomas ALEX

Nithin Thomas ALEX has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240160117
    Abstract: Apparatus and method for substrate processing are described herein. More specifically, the apparatus and method are directed towards apparatus and method for performing a field guided post exposure bake operation on a semiconductor substrate. The apparatus is a processing module (100) and includes an upper portion (102) with an electrode (400) and a base portion (104) which is configured to support a substrate (500) on a substrate support surface (159). The upper portion (102) and the base portion (104) are actuated toward and away from one another using one or more arms (112) and form a process volume (404). The process volume (404) is filled with a process fluid and the processing module (100) is rotated about an axis (A). An electric field is applied to the substrate (500) by the electrode (400) before the process fluid is drained from the process volume (404).
    Type: Application
    Filed: April 2, 2021
    Publication date: May 16, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Dmitry LUBOMIRSKY, Kyle M. HANSON, Douglas A. BUCHBERGER, Jr., Alan L. TSO, Rahul KOZHIKKALKANDI, Paul R. MCHUGH, Jiayi SUN, Qiwei LIANG, Nithin Thomas ALEX, Lancelot HUANG, Ellie Y. YIEH
  • Publication number: 20210217585
    Abstract: A method and apparatus for depositing a carbon compound on a substrate includes using an inductively coupled plasma (ICP) chamber with a chamber body, a lid, an interior volume, a pumping apparatus, and a gas delivery system and a pedestal for supporting a substrate disposed within the interior volume of the ICP chamber, the pedestal has an upper portion formed from aluminum nitride with an upper surface that is configured to support and heat a substrate with embedded heating elements and a lower portion with a tube-like structure formed from aluminum nitride that is configured to support the upper portion and house electrodes for supplying power to the embedded heating elements of the upper portion, and the pedestal is configured to heat the substrate during deposition of a carbon compound film.
    Type: Application
    Filed: October 26, 2020
    Publication date: July 15, 2021
    Inventors: Qiwei LIANG, Srinivas D. NEMANI, Chentsau Chris YING, Ellie Y. YIEH, Erica CHEN, Nithin Thomas ALEX