Patents by Inventor Nitin Bhargav

Nitin Bhargav has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHODS FOR SUSCEPTOR DEPOSITION MATERIAL REMOVAL
    Publication number: 20240033877
    Abstract: Apparatus and method for removing material from the susceptor of a batch processing chamber are described. The apparatus comprises a polishing tool including a rotatable platen positioned above the susceptor. A method comprises contacting material deposited on the susceptor with the rotatable platen to remove the material from the susceptor.
    Type: Application
    Filed: October 16, 2023
    Publication date: February 1, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Vijayabhaskara Venkatagiriyappa, Nitin Bhargav, Tae Kwang Lee
  • Apparatus and methods for susceptor deposition material removal
    Patent number: 11826873
    Abstract: Apparatus and method for removing material from the susceptor of a batch processing chamber are described. The apparatus comprises a polishing tool including a rotatable platen positioned above the susceptor. A method comprises contacting material deposited on the susceptor with the rotatable platen to remove the material from the susceptor.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: November 28, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Vijayabhaskara Venkatagiriyappa, Nitin Bhargav, Tae Kwang Lee
  • APPARATUS AND METHODS FOR SUSCEPTOR DEPOSITION MATERIAL REMOVAL
    Publication number: 20220055179
    Abstract: Apparatus and method for removing material from the susceptor of a batch processing chamber are described. The apparatus comprises a polishing tool including a rotatable platen positioned above the susceptor. A method comprises contacting material deposited on the susceptor with the rotatable platen to remove the material from the susceptor.
    Type: Application
    Filed: August 24, 2020
    Publication date: February 24, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Vijayabhaskara Venkatagiriyappa, Nitin Bhargav, Tae Kwang Lee