Abstract: Systems and methods for polishing a substrate with reduced contamination are described. A rinse arm has one or more nozzles configured to direct rinse fluid toward a polishing surface for polishing a substrate. The rinse arm further includes a fluid dispenser configured to direct rinse fluid to one or more surfaces of the rinse arm in proximity to the polishing surface and exposed to airborne slurry particles generated from slurry on the polishing surface. By maintaining the atmosphere in the vicinity of the exposed rinse arm surfaces at an elevated relative humidity level, airborne slurry particles adhering to the exposed rinse arm surfaces remain in suspension and, therefore, may be easily cleaned, e.g., during a high pressure rinse cycle. This feature reduces the likelihood that slurry particles will accumulate on exposed surfaces of the polishing apparatus and flake off while a substrate is being polished, reducing the likelihood of substrate defects caused by such slurry contamination.

Abstract: A spiral wound fuse body comprises a core of insulating material formed by a limp, dead yarn made of twisted together initially sizing-coated strands of fine ceramic filaments, where the sizing was subsequently removed so that there is no sizing to leave a conductive residue under fuse blowing conditions. Such a fuse body is mass produced by spiral winding fuse wire upon a continuous length of said yarn unwinding from a spool upon which the yarn was wound when the sizing was removed. The resulting self-supporting body can be wound into rolls and subsequently unwound so that individual fuse bodies can be severed from the end of the unwinding roll of fuse body-forming material.

Abstract: A method of making a spiral wound fuse body comprising a core of insulating material formed by a limp, dead yarn made of twisted together initially sizing-coated strands of fine ceramic filaments having no sizing to leave a conductive residue under fuse blowing conditions is mass produced by spiral winding fuse wire upon a continuous length of the yarn unwinding from a spool upon which the yarn was wound when the sizing was removed. The resulting self-supporting body can be wound into rolls and subsequently unwound so that individual fuse bodies can be severed from the end of the unwinding roll of fuse body-forming material.