Abstract: Examples of a fiber optic temperature control system is provided. The fiber optic temperature control system comprises two or more independent temperature measuring system combined into single fiber optic probe. The fiber optic temperature control system comprises at least one temperature control measuring system and an overtemperature measuring protection system. The least one temperature control measuring system comprises a first temperature controller, a first opto-electronic converter with a first light source, a first detector and a first processor, and a first fiber optic bundle with a plurality of optical fibers to provide temperature measurement from at least one point. The over temperature measuring protection system comprises a second controller, a second opto-electronic convertor with a second detector and second processor, and a second fiber optic bundle with a plurality of optical fibers.

Abstract: Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.

Abstract: Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.

Abstract: Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.

Abstract: Examples of a optoelectronic transducer module with integrated signal processing for use in thermographic temperature measurement are disclosed. The module includes a light source, an optical element to couple the light to an optical port, a connector configured to connect the optoelectronic transducer module to a fiber optic sensor, a detector to detect an emitted light from the fiber optic sensor and convert the detected emitted light into an electrical signal and a module processing unit coupled to the light source and the detector configured to convert the electrical signal into a set of digital results. The optoelectronic module is in communication with an external processing unit using a high speed circuitry for data aggregation and a low speed circuitry for configuration and firmware upgrade in the module. The opto-electronic module is replaceable during operation to avoid big downtime.

Abstract: Examples of a optoelectronic transducer module with integrated signal processing for use in thermographic temperature measurement are disclosed. The module includes a light source to provide an excitation light, an optical element to couple the light to an optical port, a connector configured to connect the optoelectronic transducer module to a fiber optic sensor, a detector coupled to the optical port to detect an emitted light from the fiber optic sensor and convert the detected emitted light into an electrical signal, a module processing unit coupled to the light source and the detector configured to convert the electrical signal into a set of digital results, a high speed circuitry in communication with an external processing unit for data aggregation and a low speed circuitry in communication with the external processing unit for configuration and firmware upgrade in the module.

Abstract: Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.

Abstract: Examples of a monolithic phosphor composite for measuring a parameter of an object are disclosed. The ceramic metal oxide phosphor composite is used in an optical device for measuring the parameter of the measuring object. The device comprises a fiber optic probe with a light guide, a light source operatively coupled to the fiber optic probe to provide excitation light into the light guide, a monolithic ceramic metal oxide phosphor composite functionally coupled to a tip of the fiber optic probe, a sensor operatively coupled to the fiber optic probe to detect the emitted light and a processing unit functionally coupled to the sensor to process the emitted light. The monolithic ceramic metal oxide phosphor composite can be embedded in a notch made into the object or can be adhered to a surface of the object with a binder.

Abstract: Examples of a monolithic phosphor composite for measuring a parameter of an object are disclosed. The ceramic metal oxide phosphor composite is used in an optical device for measuring the parameter of the measuring object. The device comprises a fiber optic probe with a light guide, a light source operatively coupled to the fiber optic probe to provide excitation light into the light guide, a monolithic ceramic metal oxide phosphor composite functionally coupled to a tip of the fiber optic probe, a sensor operatively coupled to the fiber optic probe to detect the emitted light and a processing unit functionally coupled to the sensor to process the emitted light. The monolithic ceramic metal oxide phosphor composite can be embedded in a notch made into the object or can be adhered to a surface of the object with a binder.

Abstract: Examples of an integrated active fiber optic temperature measuring device are disclosed. The integrated temperature measuring device comprises a fiber optic probe and an optoelectronic circuitry integrated into a single device which is then individually calibrated. The fiber optic probe has a fiber bundle with an active material at the tip of the probe. The optoelectronic circuitry is connected to the fiber optic probe. The optoelectronic circuitry includes a light source configured to provide an excitation light to the active material, a detector to detect the emitted light, a processing unit configured to determine a temperature based on a change in an emission intensity at a single wavelength range or the change in intensity ratio of two or more wavelength ranges, a lifetime decay, or a shift in emission wavelength peak of the emitted light, and a calibration means configured to calibrate the integrated active fiber optic temperature sensor.

Abstract: Examples of a monolithic phosphor composite for measuring a parameter of an object are disclosed. The composite comprises a thermographic phosphor and a metal oxide material that are dried and calcinated at high temperatures to form a ceramic metal oxide phosphor composite. The ceramic metal oxide phosphor composite is used in an optical device for measuring the parameter of the measuring object. The device comprises a fiber optic probe with a light guide, a light source operatively coupled to the fiber optic probe to provide excitation light into the light guide, a monolithic ceramic metal oxide phosphor composite functionally coupled to a tip of the fiber optic probe, a sensor operatively coupled to the fiber optic probe to detect the emitted light and a processing unit functionally coupled to the sensor to process the emitted light.