Patents by Inventor Noam GLUZER

Noam GLUZER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Direct focusing with image binning in metrology tools
    Patent number: 10897566
    Abstract: Focusing methods and modules are provided for metrology tools and systems. Methods comprise capturing image(s) of at least two layers of a ROI in an imaging target, binning the captured image(s), deriving a focus shift from the binned captured image(s) by comparing the layers, and calculating a focus position from the derived focus shift. Disclosed methods are direct, may be carried out in parallel to a part of the overlay measurement process and provide fast and simple focus measurements that improve metrology performance.
    Type: Grant
    Filed: August 25, 2017
    Date of Patent: January 19, 2021
    Assignee: KLA-Tencor Corporation
    Inventors: Nadav Gutman, Boris Golovanevsky, Noam Gluzer
  • Direct Focusing with Image Binning in Metrology Tools
    Publication number: 20190208108
    Abstract: Focusing methods and modules are provided for metrology tools and systems. Methods comprise capturing image(s) of at least two layers of a ROI in an imaging target, binning the captured image(s), deriving a focus shift from the binned captured image(s) by comparing the layers, and calculating a focus position from the derived focus shift. Disclosed methods are direct, may be carried out in parallel to a part of the overlay measurement process and provide fast and simple focus measurements that improve metrology performance.
    Type: Application
    Filed: August 25, 2017
    Publication date: July 4, 2019
    Applicant: KLA-Tencor Corporation
    Inventors: Nadav GUTMAN, Boris GOLOVANEVSKY, Noam GLUZER