Patents by Inventor Nobert Kaiser

Nobert Kaiser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermally stable multilayer mirror for the EUV spectral range
    Patent number: 7986455
    Abstract: A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.
    Type: Grant
    Filed: August 8, 2008
    Date of Patent: July 26, 2011
    Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
    Inventors: Torsten Feigl, Nicolas Benoit, Sergiy Yulin, Nobert Kaiser
  • Thermally Stable Multilayer Mirror for the EUV Spectral Range
    Publication number: 20090009858
    Abstract: A multilayer mirror includes a layer sequence arranged on a substrate and a plurality of layer pairs. Each layer pair includes a first layer composed of a first material and a second layer composed of a second material. The first layers and the second layers each have a thickness of more than 2 nm, and the first material or the second material is a silicon boride or a molybdenum nitride.
    Type: Application
    Filed: August 8, 2008
    Publication date: January 8, 2009
    Inventors: Torsten Feigl, Nicolas Benoit, Sergiy Yulin, Nobert Kaiser