Abstract: A compressor, characterized in that a steel is used as the base material for the other sliding material vane 10 and nitrided, a CrN or DLC film is formed on the surface by PVD treatment, and a Ni-Cr-Mo cast iron is used for the other corresponding sliding material piston 9. It is possible in such a configuration to suppress the temperature rise by sliding friction of the sliding materials, such as the vane tip region 10a and the peripheral region of piston 9 that are vigorously slid, relax decomposition of the refrigerant, and suppress corrosion by hydrogen fluoride generated in reaction with water and oxygen, and thus to provide a compressor higher in reliability.

Abstract: Lifetime required of mobile-use fuel cells is secured and prolonged, stabilized pump performance is maintained by preventing bearing seizure and abnormal wear. The shaft (101) of a pump mechanism section (100) and the shaft (201) of a motor section (200) are integrated, and the shafts (101, 201) are supported by two or more ball bearings disposed in the pump mechanism section (100), thereby making it possible to fill grease in the closed spaces of the ball bearings (300), and secure a sufficient lifetime basically with almost no possibility of the grease leaking out, even if it is used at a relatively high environmental temperature.

Abstract: a First gap (15) in a thrust direction between teeth bottoms of a fixed mirror plate (2b) and teeth tips of an orbiting lap (4a), and a second gap (16) in the thrust direction between teeth bottoms of an orbiting mirror plate 4b and teeth tips of a fixed lap (2a) are formed such as to gradually increase from an outer peripheral side to an inner peripheral side of a scroll compressor, the first gap (15) is made greater than the second gap (16). Contact surface pressures of the laps (2a) and (4a) are kept low with respect to pressure formation, contact pressure of the teeth tips of the fixed scroll part (2) and the teeth bottoms of the orbiting scroll part (4)are equally maintained. With this loads applied to the scroll parts (2) and (4)are equally received by a thrust surface.

Abstract: A scroll compressor in which a scroll fixed lap rising from a fixed plate of a fixed scroll and a scroll orbiting lap rising from an orbiting plate of an orbiting scroll are combined with each other to form compression chambers therebetween, the fixed scroll is made of iron-based material, the orbiting scroll is made of aluminum-based material, at least the plate back surface of the orbiting scroll is subjected to surface processing.

Abstract: It is an object of the present invention to provide a vane rotary type air pump in which a pump mechanism and a drive motor are directly connected to each other and low noise is realized. In the vane rotary type air pump in which a cylinder (103), a rotor (110 ) and a vane (112) are sandwiched between a front plate (not shown) and a rear plate (not shown), an opened end (111b) of the vane groove (111) is provided in a reversed rotation direction region of the rotor (110) with respect to straight line connecting a center O of the rotor (110) and the closed end (111a) of the vane groove (111). That is, a “stroke” type vane disposition is employed. With this noise of the air pump is reduced.

Abstract: A back pressure chamber (12) provided on a back surface of an orbiting scroll (5) is divided into an inner region (12a) and an outer region (12b) by an annular seal (11). A diameter d of the annular seal (11) is set 0.5 times or more of a diameter D of an orbiting mirror plate (5a). With this, plus thrust force can be applied to the orbiting scroll (5) irrespective of magnitude of a discharge pressure Pd applied to the inner region (12a). Therefore, it is possible to push the orbiting scroll (5) against the fixed scroll (4) only by back pressure of discharge pressure. A set pressure Pm of the outer region (12b) is reduced to a value close to a suction pressure Ps, a pressure adjusting mechanism (20) is swiftly opened after a scroll compressor is started. With this, lubricant oil is supplied from the outer region (12b) to the suction space (9) without a time lag.

Abstract: A susceptor capable of reducing unevenness in a film-thickness of an epitaxial film on an outer surface of a substrate wafer and a manufacturing apparatus of an epitaxial wafer are provided. The susceptor includes a wafer placement and a peripheral portion. The wafer placement is greater in size than the substrate wafer W and substantially disc-shaped. The peripheral portion is substantially in a ring-plate shape and includes: an inner circumference standing in a fashion surrounding a peripheral portion of the wafer placement; and an upper surface outwardly extending from an upper end of the inner circumference in parallel to the placement surface of the wafer placement. In the chemical vapor deposition control unit, an inner circumference has a curvature substantially similar to a curvature of the inner circumference of the peripheral portion, and the upper surface is leveled with the upper surface) of the peripheral portion.

Abstract: According to the present invention, an oil supply passage is formed in a suction space of a fixed scroll part, and an oil collision part is provided in the suction space. The oil collision part is provided in the suction space, an amount of oil to be supplied is controlled, refrigerant and lubricant oil are sufficiently mixed with each other. Tangents of ends of the oil collision part are made acute angle to smoothen the flow of the refrigerant.

Abstract: Lifetime required of mobile-use fuel cells is secured and prolonged, stabilized pump performance is maintained by preventing bearing seizure and abnormal wear. The shaft (101) of a pump mechanism section (100) and the shaft (201) of a motor section (200) are integrated, and the shafts (101, 201) are supported by two or more ball bearings disposed in the pump mechanism section (100), thereby making it possible to fill grease in the closed spaces of the ball bearings (300), and secure a sufficient lifetime basically with almost no possibility of the grease leaking out, even if it is used at a relatively high environmental temperature.

Abstract: A back pressure chamber 12 provided on a back surface of an orbiting scroll 5 is divided into an inner region 12a and an outer region 12b by an annular seal 11. A diameter d of the annular seal 11 is set 0.5 times or more of a diameter D of an orbiting mirror plate 5a. With this, plus thrust force can be applied to the orbiting scroll 5 irrespective of magnitude of a discharge pressure Pd applied to the inner region 12a. Therefore, it is possible to push the orbiting scroll 5 against the fixed scroll 4 only by back pressure of discharge pressure. A set pressure Pm of the outer region 12b is reduced to a value close to a suction pressure Ps, a pressure adjusting mechanism 20 is swiftly opened after a scroll compressor is started. With this, lubricant oil is supplied from the outer region 12b to the suction space 9 without a time lag.

Abstract: A reactant gas is supplied to a gas inlet port 40B of a reaction chamber 20A from a plurality of gas flow paths 36A. The number of gas flow paths 36A is five or more within a range of one side of the gas inlet port 40B divided in two at the center thereof. The pitch between adjacent gas flow paths 36A is 10 mm or more. A baffle 38 having a plurality of slit holes 38A is disposed upstream of the gas flow paths 36A. The gas flow rates of the respective gas flow paths 36A are adjusted by recurrent calculation using layer growth sensitivity data that defines the relation between the gas flow rates of the respective gas flow paths 36A.

Abstract: It is an object of the present invention to provide a vane rotary type air pump in which a pump mechanism and a drive motor are directly connected to each other and low noise is realized. In the vane rotary type air pump in which a cylinder 103, a rotor 110 and a vane 112 are sandwiched between a front plate (not shown) and a rear plate (not shown), an opened end 111b of the vane groove 111 is provided in a reversed rotation direction region of the rotor 110 with respect to straight line connecting a center O of the rotor 110 and the closed end 111a of the vane groove 111. That is, a “stroke” type vane disposition is employed. With this noise of the air pump is reduced.

Abstract: A scroll compressor in which a scroll fixed lap rising from a fixed plate of a fixed scroll and a scroll orbiting lap rising from an orbiting plate of an orbiting scroll are combined with each other to form compression chambers therebetween, the fixed scroll is made of iron-based material, the orbiting scroll is made of aluminum-based material, at least the plate back surface of the orbiting scroll is subjected to surface processing.

Abstract: According to the present invention, an oil supply passage is formed in a suction space of a fixed scroll part, and an oil collision part is provided in the suction space. The oil collision part is provided in the suction space, an amount of oil to be supplied is controlled, refrigerant and lubricant oil are sufficiently mixed with each other. Tangents of ends of the oil collision part are made acute angle to smoothen the flow of the refrigerant.

Abstract: a First gap 15 in a thrust direction between teeth bottoms of a fixed mirror plate 2b and teeth tips of an orbiting lap 4a, and a second gap 16 in the thrust direction between teeth bottoms of an orbiting mirror plate 4b and teeth tips of a fixed lap 2a are formed such as to gradually increase from an outer peripheral side to an inner peripheral side of a scroll compressor, the first gap 15 is made greater than the second gap 16. Contact surface pressures of the laps 2a and 4a are kept low with respect to pressure deformation, contact pressure of the teeth tips of the fixed scroll part 2 and the teeth bottoms of the orbiting scroll part 4 are equally maintained. With this loads applied to the scroll parts 2 and 4 are equally received by a thrust surface.

Abstract: A scroll compressor, whose back pressure is easily controlled and compression efficiency is high, is provided. The scroll compressor includes a plurality of compression chambers formed by engaging a fixed-scroll wrap and an orbiting-scroll wrap, and a back pressure chamber formed at an opposite side of the orbiting-scroll wrap of a orbiting-scroll. The scroll compressor additionally includes a high pressure chamber and a middle pressure chamber, which are formed by dividing the back pressure chamber using a seal. Moreover, the scroll compressor includes a first path for supplying lube oil from the high pressure chamber to the middle pressure chamber, and a second path for supplying the lube oil from the middle pressure chamber to an suction chamber of the compression chambers. The first path is intermittently opened by orbit of the orbiting-scroll.

Abstract: It is an object of the present invention to provide an air supply apparatus capable of increasing a height of a scroll lap. The air supply apparatus comprising a stator fixed to a motor frame, a rotor which is fixed to a motor shaft and rotated in the stator, a orbiting scroll which is operated by a mechanism shaft, a stationary scroll for forming a compression space between the stationary scroll itself and the orbiting scroll, and a rotation-restraint member for turning the orbiting scroll, in which the motor shaft and the mechanism shaft are connected to each other, the mechanism shaft passes through the orbiting scroll and the stationary scroll, the mechanism shaft is held by opposite ends of the orbiting scroll, wherein opposite ends of the motor shaft are rotatably held by a first bearing and a second bearing, one end of the mechanism shaft is held by the second bearing.

Abstract: It is an object of the present invention to reduce the constraint that the density ratio is constant as small as possible, and to obtain high power recovering effect in a wide operation range by using an expander which is operated in accordance with a flowing direction of refrigerant. An expander used in a refrigeration cycle uses carbon dioxide as refrigerant and has a compressor, an outdoor heat exchanger and an indoor heat exchanger. The expander comprises a cylindrical cylinder, a rotor which rotates in the cylinder, a vane which divides an expansion space formed between an inner peripheral surface of the cylinder and an outer peripheral surface of the rotor into a plurality of spaces, and a vane groove provided in the rotor for accommodating the vane therein. The vane groove is provided with a back pressure chamber which pushes the vane against the inner peripheral surface of the cylinder, and the refrigerant in the supercritical state is introduced into the back pressure chamber.

Abstract: According to a scroll compressor of the present invention, lubricant is supplied to a compression chamber in the proportions of 2% by weight or more and less than 20% by weight of the lubricant to the sucked refrigerant amount. With this, it is possible to provide an efficient scroll compressor even when carbon dioxide is used as the refrigerant.

Abstract: It is an object of the present invention to reduce the constraint that the density ratio is constant as small as possible, and to obtain high power recovering effect in a wide operation range by using an expander which is operated in accordance with a flowing direction of refrigerant. An expander used in a refrigeration cycle uses carbon dioxide as refrigerant and has a compressor, an outdoor heat exchanger and an indoor heat exchanger. The expander comprises a cylindrical cylinder, a rotor which rotates in the cylinder, a vane which divides an expansion space formed between an inner peripheral surface of the cylinder and an outer peripheral surface of the rotor into a plurality of spaces, and a vane groove provided in the rotor for accommodating the vane therein. The vane groove is provided with a back pressure chamber which pushes the vane against the inner peripheral surface of the cylinder, and the refrigerant in the supercritical state is introduced into the back pressure chamber.