Abstract: A reflection type ellipsometer for measuring the phase difference of a sample, which comprises a light source, a polarizer, a sample, an analyzer and a photoelectric converter element arranged in the conventional manner. In accordance with the present invention the ellipsometer includes an adjustable phase difference compensating plate which is disposed on the light path between the polarizer and the analyzer and at an azimuth of 0.degree. with respect to the sample surface, the phase difference (.DELTA. C) introduced by the compensating plate being preset to a value which eliminates a predetermined or reference phase difference (.DELTA. o). The ellipsometer of the present invention further includes a double-refractive element which introduces a double refraction phase difference proportional to a voltage applied thereto. The double-refractive element is also disposed on the light path between the polarizer and the analyzer.

Abstract: In a microscope stage device comprising a first and a second stage movable in Y- and X-direction, respectively, by means of a first and a second rotatable member operable by two handles mounted for rotation about a single shaft, there are provided first and second transmission means provided between one of the two handles and the first rotatable member and between the other handle and the second rotatable member, respectively, to adjust the amount of movement of each of the stages caused by rotation of each of the handles so that when each of the handles is rotated within a predetermined angle of rotation, each of the stages corresponding to each of the handles is moved for fine adjustment and when each of the handles is rotated beyond the predetermined angle of rotation, each of the stages corresponding to each of the handles is moved for coarse adjustment.