Abstract: To uniformize the light intensity distribution on an irradiated surface in a light source device including a light-emitting diode (LED) array, a light source device includes a light-emitting diode (LED) array including a circuit having a substrate, a plurality of LED chips on the substrate, and a power supply. A predetermined plane is illuminated with light from the LED array. The plurality of LED chips includes first LED chips and second LED chips different from the first LED chips placed in a same column of the circuit, and the first LED chips have a placement angle different from a placement angle of the second LED chips.

Abstract: The present invention is directed to adjusting a light intensity distribution on an irradiation target surface into a desired distribution with use of a light source apparatus including a light emitting diode (LED) array. A light source apparatus includes an LED array including a plurality of LED chips, and a controller configured to control the plurality of LED chips. A light intensity distribution acquired from each of the plurality of LED chips is superimposed on a light intensity distribution oriented in a different direction from each other on a predetermined surface. The controller controls an output of at least one of the plurality of LED chips, thereby changing the light intensity distribution that the plurality of LED chips forms on the predetermined surface.

Abstract: An illumination apparatus includes a plurality of LED chips arranged to form an LED array, light from the plurality of LED chips superimpose to project a light intensity distribution projected on the predetermined plane; a pair of lens arrays each including a plurality of lenses and configured to collect light from the LED arrays; a driving unit configured to adjust a distance between the pair of lens arrays and change the light intensity distribution projected on the predetermined plane; and a control unit for individually controlling the output of the first and second LED arrays.

Abstract: To uniformize the light intensity distribution on an irradiated surface in a light source device including a light-emitting diode (LED) array, a light source device includes a light-emitting diode (LED) array including a circuit having a substrate, a plurality of LED chips on the substrate, and a power supply. A predetermined plane is illuminated with light from the LED array. The plurality of LED chips includes first LED chips and second LED chips different from the first LED chips placed in a same column of the circuit, and the first LED chips have a placement angle different from a placement angle of the second LED chips.

Abstract: There is provided a substrate holding apparatus including a base provided with a gap and a reflection member disposed in the gap and configured to reflect light that has transmitted the substrate to the substrate side, and an exposure apparatus including the substrate holding apparatus.

Abstract: A light intensity distribution on an irradiation target plane is adjusted to a desired distribution using a light source device that includes a light-emitting diode (LED) array. A light source device that includes an LED array in which a plurality of LED chips is arranged and forms on a predetermined plane a light intensity distribution obtained by superimposing light intensity distributions of light from the plurality of LED chips includes a pair of lens arrays including a plurality of lenses configured to collect light from the plurality of LED chips, wherein a distance between the pair of lens arrays is changed, thereby changing the light intensity distribution to be formed on the predetermined plane.

Abstract: An exposure apparatus that performs scanning exposure for a substrate is provided. The apparatus comprises a light source, a digital mirror device including a plurality of mirrors capable of controlling a direction of light emitted from the light source and configured to operate to adjust an integrated exposure amount on the substrate in accordance with scanning of the substrate, a projection optical system configured to guide light from the digital mirror device to the substrate and project a pattern onto the substrate, and a controller configured to control the plurality of mirrors in the digital mirror device based on the pattern to be projected onto the substrate, wherein the controller controls the plurality of mirrors such that an integrated exposure amount in an edge portion of the pattern becomes larger than an integrated exposure amount in a portion other than the edge portion.

Abstract: The present invention is directed to adjusting a light intensity distribution on an irradiation target surface into a desired distribution with use of a light source apparatus including a light emitting diode (LED) array. A light source apparatus includes an LED array including a plurality of LED chips, and a controller configured to control the plurality of LED chips. A light intensity distribution acquired from each of the plurality of LED chips is superimposed on a light intensity distribution oriented in a different direction from each other on a predetermined surface. The controller controls an output of at least one of the plurality of LED chips, thereby changing the light intensity distribution that the plurality of LED chips forms on the predetermined surface.

Abstract: There is provided a substrate holding apparatus including a base provided with a gap and a reflection member disposed in the gap and configured to reflect light that has transmitted the substrate to the substrate side, and an exposure apparatus including the substrate holding apparatus.

Abstract: An exposure apparatus that performs scanning exposure for a substrate is provided. The apparatus comprises a light source, a digital mirror device including a plurality of mirrors capable of controlling a direction of light emitted from the light source and configured to operate to adjust an integrated exposure amount on the substrate in accordance with scanning of the substrate, a projection optical system configured to guide light from the digital mirror device to the substrate and project a pattern onto the substrate, and a controller configured to control the plurality of mirrors in the digital mirror device based on the pattern to be projected onto the substrate, wherein the controller controls the plurality of mirrors such that an integrated exposure amount in an edge portion of the pattern becomes larger than an integrated exposure amount in a portion other than the edge portion.

Abstract: A cooling apparatus for cooling a light source unit is provided. The cooling apparatus includes a cooling unit provided outside a path of light from the light source unit, and a heat pipe configured to connect a heat generating portion of the light source unit and the cooling unit. The heat pipe also serves as an electrode wire of the light source unit.

Abstract: An illumination device includes a plurality of light source units, each including a light source, a mirror that reflects light from the light source, and one or more light blocking members that block the light that is reflected by the mirror and travels toward the illumination surface; and an illumination optical system that forms a light intensity distribution of superposed light, in which the light from each of the light source units is superposed, in a pupil plane and illuminates the illumination surface with the superposed light. In the light intensity distribution in the pupil plane of the illumination optical system, positions of shadows of all of the light blocking members included in one of the light source units are separated from positions of shadows of all of the light blocking members included in at least one of the remaining light source units.

Abstract: A cooling apparatus for cooling a light source unit is provided. The cooling apparatus includes a cooling unit provided outside a path of light from the light source unit, and a heat pipe configured to connect a heat generating portion of the light source unit and the cooling unit. The heat pipe also serves as an electrode wire of the light source unit.

Abstract: An illumination optical system comprises plural rod integrators, a combining optical system and a light transmission unit. The rod integrators uniformize light intensity distributions of the light beams. The combining optical system combines the light beams emitted from the rod integrators, so that the light beams are adjacent to each other in cross-sections thereof. The light transmission unit has an entrance plane and an exit plane, divides the light beam combined by the combining optical system into plural light beams on the entrance plane, joins the divided light beams so that a cross-sectional shape of a joined pattern of the light beams on the exit plane is different from a cross-sectional shape of a joined pattern of the light beams on the entrance plane, and transfers each of the light beams from the entrance plane to the exit plane using plural optically coupled light pipes.

Abstract: An illumination device includes a plurality of light source units, each including a light source, a mirror that reflects light from the light source, and one or more light blocking members that block the light that is reflected by the mirror and travels toward the illumination surface; and an illumination optical system that forms a light intensity distribution of superposed light, in which the light from each of the light source units is superposed, in a pupil plane and illuminates the illumination surface with the superposed light. In the light intensity distribution in the pupil plane of the illumination optical system, positions of shadows of all of the light blocking members included in one of the light source units are separated from positions of shadows of all of the light blocking members included in at least one of the remaining light source units.

Abstract: An illumination optical system comprises plural rod integrators, a combining optical system and a light transmission unit. The rod integrators uniformize light intensity distributions of the light beams. The combining optical system combines the light beams emitted from the rod integrators, so that the light beams are adjacent to each other in cross-sections thereof. The light transmission unit has an entrance plane and an exit plane, divides the light beam combined by the combining optical system into plural light beams on the entrance plane, joins the divided light beams so that a cross-sectional shape of a joined pattern of the light beams on the exit plane is different from a cross-sectional shape of a joined pattern of the light beams on the entrance plane, and transfers each of the light beams from the entrance plane to the exit plane using plural optically coupled light pipes.

Abstract: This invention is a projection optical system which includes a plurality of lens groups and projects an image of a first object onto a second object. A bottom lens group of the plurality of lens groups which is positioned nearest to the second object is made of an isotropic crystal material having a refractive index of 1.6 or more and has a positive focal length. A curvature radius R (mm) of a surface of the bottom lens group which is located on the first object side and a center thickness d (mm) of the bottom lens group satisfy 3.0>R/d>1.6 and d<60.

Abstract: An exposure apparatus which exposes a substrate to light. An illumination optical system illuminates a mask with illumination light, and a projection optical system projects a pattern of the mask onto the substrate. The illumination light contains a primary component of polarized light and a secondary component of the polarized light, which are perpendicular to each other, and the illumination optical system includes a phase difference adjusting unit configured to adjust a phase difference between the primary component of the polarized light and the secondary component of the polarized light, without changing a direction of the primary component of the polarized light.

Abstract: This invention is a projection optical system which includes a plurality of lens groups and projects an image of a first object onto a second object. A bottom lens group of the plurality of lens groups which is positioned nearest to the second object is made of an isotropic crystal material having a refractive index of 1.6 or more and has a positive focal length. A curvature radius R (mm) of a surface of the bottom lens group which is located on the first object side and a center thickness d (mm) of the bottom lens group satisfy 3.0>R/d>1.6 and d<60.

Abstract: An exposure apparatus which exposes a substrate to light includes an illumination optical system which illuminates a mask with illumination light, and a projection optical system which projects the pattern of the mask onto the substrate. The illumination light contains the primary component of polarized light and the secondary component of the polarized light, which are perpendicular to each other. The illumination optical system includes a phase difference adjusting unit including a function of continuously adjusting the phase difference between the primary component of the polarized light and the secondary component of the polarized light without changing the direction of the primary component of the polarized light.