Patents by Inventor Noboru Tozawa

Noboru Tozawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transfer apparatus having an elevator and prober using the same
    Patent number: 5506512
    Abstract: A prober for a semiconductor wafer includes a main body having an interface section connected to probe needles, a test head detachably attached to the interface section, and a manipulator for moving the test head. The manipulator includes X-, Y-, Z-, .theta.X-, .theta.Y-, and .theta.Z-positioning mechanisms for positioning the test head in six directions. The Z-positioning mechanism consists of an elevator which is installed on a base and drives a slide frame. A fall preventing mechanism is provided adjacent to the elevator. The fall preventing mechanism includes a nut of a ball thread provided on the slide frame, and a shaft of the ball thread which is engaged with the nut. A brake shoe is provided at the lower end of the shaft. A brake seat is provided on the base and faces the lower surface of the brake shoe. A ball pushed by a spring is in point-contact with the center of the lower surface of the brake shoe, so that a small gap is formed between the brake shoe and the brake seat.
    Type: Grant
    Filed: November 23, 1994
    Date of Patent: April 9, 1996
    Assignees: Tokyo Electron Limited, Tokyo Electron Yamanashi Limited
    Inventors: Noboru Tozawa, Hisashi Nakajima, Kazuhito Yokomori