Abstract: A second housing whose center portion is depressed and whose end portion around the center portion is formed like a visor is arranged around a first housing whose center portion is depressed and whose end portion around the center portion is formed like a visor, and a hollow portion is formed between the first housing and the second housing by sandwiching a packing between the end portions of the housings. Further, degassed water for preventing empty heating is filled in the hollow portion, and an ultrasonic transducer is placed on the surface of the center portion of the first housing. A weight for preventing the vibration of the wall is provided on the wall surface of the second housing. Since the vibration of the wall of the housing is suppressed by the weight, vibration energy returns toward the bottom surface of the center of the housing through water and is radiated from the bottom surface efficiently as ultrasonic waves.

Abstract: By press-fitting a cylindrical blank into a die with one of a pair of punches, and at the same time press-fitting small diameter end portions and tapered portions of the pair of punches into both ends of the cylindrical blank while restraining both end surfaces of the blank with cylindrical members movable on the outsides of the punches, the external circumferential surface of the blank is finish molded to the required diameter by the internal circumferential surface of the die and, at the same time, tapered surfaces are formed on the inner circumferential surface in both ends of the blank. The process produces a bushing with its internal surfaces accurately coaxial, and with the external surface accurately formed to the required diameter.

Abstract: A second housing whose center portion is depressed and whose end portion around the center portion is formed like a visor is arranged around a first housing whose center portion is depressed and whose end portion around the center portion is formed like a visor, and a hollow portion is formed between the first housing and the second housing by sandwiching a packing between the end portions of the housings. Further, degassed water for preventing empty heating is filled in the hollow portion, and an ultrasonic transducer is placed on the surface of the center portion of the first housing. A weight for preventing the vibration of the wall is provided on the wall surface of the second housing. Since the vibration of the wall of the housing is suppressed by the weight, vibration energy returns toward the bottom surface of the center of the housing through water and is radiated from the bottom surface efficiently as ultrasonic waves.

Abstract: Disclosed is a drying nozzle for realizing a high-efficiency drying device capable of drying an object to be processed to a sufficient degree. The drying nozzle includes a drying gas supply portion having an air supply tube for supplying air for drying a substrate whose surface is wet with a liquid by being sprayed against the surface of the substrate, and a gas/liquid mixture discharge portion which is spaced apart from the surface of the substrate by a predetermined distance to thereby make the thickness of the liquid adhering to the surface of the substrate prior to the drying constant and which has a porous material having a large number of through-holes for discharging the air/liquid mixture consisting of air and the liquid,from the surface of the substrate, the drying gas supply portion and the gas/liquid mixture discharge portion being arranged along the surface of the object so as to be adjacent to each other.

Abstract: An ultrasonic vibrator includes a diaphragm, a side plate which stands on the principal surface of the diaphragm, and a vibrator body placed inside the side plate on the principal surface of the diaphragm in order to apply ultrasonic vibration to the diaphragm. The diaphragm has a thin portion at least in a part of the periphery of an area where the vibrator body is placed. A wet-treatment nozzle includes a supply pipe having, at one end, an inlet for admitting a treatment liquid, a drain pipe having, at one end, an outlet for discharging the waste liquid to the outside after wet treatment, and a connecting portion which faces a workpiece and which connects the other ends of the supply pipe and the drain pipe. The ultrasonic vibrator is placed in the connecting portion of the wet-treatment nozzle.

Abstract: A gas solution producing device having a simple structure to reduce a start-up time, and capable of reducing an amount of gas or solution for use, and a method therefor, as well as a cleaning device employing them. An ozone water solution producing device of the present invention includes a gas dissolving module for bringing ozone gas and deionized water in contact with each other for production of ozone solution, a gas introducing pipe for introducing ozone gas from an ozone gas producing device to the gas dissolving module, a buffer, connected on the gas introducing pipe, for temporarily storing ozone gas and thereafter discharging the gas stored to the gas introducing pipe, a first valve for opening or closing the gas introducing pipe to switch introduction and suspension of gas flow to the gas dissolving module, and backflow prevention valve for preventing a backflow of the gas discharged from the buffer.