Abstract: A micro-mixer of a simple structure suited to form a micro-mixed liquid from two kinds of liquids A and B comprises a plurality of passage modules 7 stacked and thereby forming a multi-tiered flow passage. Each of the passage modules has a plurality of combining-dividing units 10 arranged at regular intervals. Each of the combining-dividing units has two inlets 11a, 11b and two outlets 12a, 12b. The two outlets 12a, 12b of each of the combining-dividing units in each of the stacked passage modules are connected with an inlet 11a of a combining-dividing unit and an inlet 11b of another combining-dividing unit in its immediate downstream passage module, respectively.

Abstract: A sampling syringe unit includes a syringe base for defining a chamber in cooperation with a diaphragm, a needle protruding substantially perpendicularly from the syringe base and communicating with the chamber, and a protective member which, in a normal state, is elastically urged to be located more outward than the tip of the needle. A sampling device to which the sampling syringe unit is removably attached includes a first actuator for displacing the syringe base, and a second actuator for displacing the diaphragm and then releasing the displacing force to restore the diaphragm and thereby cause a suction pressure to be produced in the chamber.

Abstract: An integrated sensor device having a structure suited for mass production despite of a short lifetime and automatically replaceable, and a measuring system realizing a continuous monitoring at a low cost by using the integrated sensor device are disclosed. The integrated sensor device is constructed into a signal integrated circuit device comprising a sensor unit (6) for measuring a change in the quantity or concentration of a substance; a control unit (7) for processing a signal representing the measurement result; and an antenna unit (10) for transmitting the processed signal to the outside and for receiving an energy necessary for the transmission and the operations of the sensor unit (6) and the control unit (7).

Abstract: A semiconductor pressure sensor is presented. The pressure sensor includes a silicon substrate with a diaphragm that produces a distortion depending on the pressure. Strain gauges are provided on the main surface side of the silicon substrate with the diaphragm and are formed by conductive diffusion resistors different from the substrate. A getter is provided on the main surface side of the silicon substrate including the periphery of the strain gauges adjacent to the strain gauges. The getter includes the PN-junction area to which reverse bias is impressed so that the metal impurities of at least an Fe atom that are contained in the silicon substrate may be captured.

Abstract: A micro-mixer of a simple structure suited to form a micro-mixed liquid from two kinds of liquids A and B comprises a plurality of passage modules 7 stacked and thereby forming a multi-tiered flow passage. Each of the passage modules has a plurality of combining-dividing units 10 arranged at regular intervals. Each of the combining-dividing units has two inlets 11a, 11b and two outlets 12a, 12b. The two outlets 12a, 12b of each of the combining-dividing units in each of the stacked passage modules are connected with an inlet 11a of a combining-dividing unit and an inlet 11b of another combining-dividing unit in its immediate downstream passage module, respectively.

Abstract: An emulsifying apparatus includes a multistage channel provided between plural inlets and a single outlet and having plural channel stages. A sectional area of the individual channel stage is larger than that of the immediately downstream channel stage on the outlet side, so that shearing rate of fluids flowing in the multistage channel gradually increases toward the outlet side to promote fluid dispersion, whereby a high-quality emulsion having an uniform particle diameter is produced with excellent mass producibility.

Abstract: An integrated sensor device having a structure suited for mass production despite of a short lifetime and automatically replaceable, and a measuring system realizing a continuous monitoring at a low cost by using the integrated sensor device are disclosed. The integrated sensor device is constructed into a signal integrated circuit device comprising a sensor unit (6) for measuring a change in the quantity or concentration of a substance; a control unit (7) for processing a signal representing the measurement result; and an antenna unit (10) for transmitting the processed signal to the outside and for receiving an energy necessary for the transmission and the operations of the sensor unit (6) and the control unit (7).

Abstract: A cylindrical, electrical insulating region is formed in a circuit substrate made of a semiconductor substrate to continuously extend from the upper surface to the lower surface of the semiconductor substrate and be closed in a plane parallel to the surface of the semiconductor substrate. The electrical insulating region is formed by an insulating region made of a heat-resistant insulating material. The insulating region is formed by forming a through hole or trench in the circuit substrate and forming an oxide film or nitride film on the wall surface of the hole or trench or filling it with an insulating material. When the trench is formed, the substrate is thinned by polishing or the like until the trench appears on the upper and lower surfaces of the substrate after the insulating region is formed. The region surrounded by the insulating region functions as an electrode when the conductivity of the region is increased by diffusing an impurity in it.

Abstract: A hydrophilic polymer material such as polyvinyl alcohol is formed into a porous film (301). A film (holding film) (303) made from a hydrophobic polymer material such as polyvinyl acetate is formed on the inner walls of a large number of pores (302) formed in the porous film (301). Lithium chloride (304) is held in these pores (302).

Abstract: A cylindrical, electrical insulating region is formed in a circuit substrate made of a semiconductor substrate to continuously extend from the upper surface to the lower surface of the semiconductor substrate and be closed in a plane parallel to the surface of the semiconductor substrate. The electrical insulating region is formed by an insulating region made of a heat-resistant insulating material. The insulating region is formed by forming a through hole or trench in the circuit substrate and forming an oxide film or nitride film on the wall surface of the hole or trench or filling it with an insulating material. When the trench is formed, the substrate is thinned by polishing or the like until the trench appears on the upper and lower surfaces of the substrate after the insulating region is formed. The region surrounded by the insulating region functions as an electrode when the conductivity of the region is increased by diffusing an impurity in it.

Abstract: A cylindrical, electrical insulating region is formed in a circuit substrate made of a semiconductor substrate to continuously extend from the upper surface to the lower surface of the semiconductor substrate and be closed in a plane parallel to the surface of the semiconductor substrate. The electrical insulating region is formed by an insulating region made of a heat-resistant insulating material. The insulating region is formed by forming a through hole or trench in the circuit substrate and forming an oxide film or nitride film on the wall surface of the hole or trench or filling it with an insulating material. When the trench is formed, the substrate is thinned by polishing or the like until the trench appears on the upper and lower surfaces of the substrate after the insulating region is formed. The region surrounded by the insulating region functions as an electrode when the conductivity of the region is increased by diffusing an impurity in it.

Abstract: A moisture sensitive element in which a functional film is formed in contact with opposing electrodes arranged on a substrate. The element includes a mechanism for measuring the temperature of the functional film. The functional film has a porous structure made from a polymer material with hydrophilic properties and includes fine pores. A holding film is formed on inner walls of the pores and made from another polymer material having hydrophobic properties. An electrolytic salt is held within the pores.

Abstract: A microsensor system for determining water vapor content of the ambient atmosphere that uses a thin film suspended ceramic diaphragm structure featuring an embedded, patterned thin film heater, temperature sensor and an external film of an hygroscopic salt stabilized in a water-insoluble, crosslinked polymer matrix and contacting a pair of patterned electrodes which are proximate to the heater. The heater controls a selected electrical parameter of the salt to a fixed, predetermined value, as determined by its electrical characteristics. The dew point of the atmosphere is determined based on the dynamic relation with the salt dehydration temperature.