Patents by Inventor Nobuaki Manada

Nobuaki Manada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for epitaxially growing a chemical compound crystal
    Patent number: 5525156
    Abstract: An apparatus for epitaxially growing a chemical-compound crystal, a plurality of raw-material gases are alternately introduced into a closed chamber of a crystal growing device to grow the crystal placed within the closed chamber. At growing of the crystal, a light from a light source is emitted to a crystal growing film of the crystal. Intensity of a light reflected from the crystal growing film and received by a photo detector is measured. Charge amounts of the respective raw-material gases are controlled by a control system on the basis of a change in the reflected-light intensity, thereby controlling a growing rate of the growing film.
    Type: Grant
    Filed: March 10, 1995
    Date of Patent: June 11, 1996
    Assignees: Research Development Corporation, Nobuaki Manada, Junji Ito, Toru Kurabayashi, Jun-Ichi Nichizawa
    Inventors: Nobuaki Manada, Junji Ito, Toru Kurabayashi, Jun-Ichi Nishizawa
  • Method of and apparatus for epitaxially growing chemical compound crystal
    Patent number: 5463977
    Abstract: In a method of and an apparatus for epitaxially growing a chemical-compound crystal, a plurality of raw-material gasses are alternately introduced into a closed chamber of a crystal growing device to grow the crystal placed within the closed chamber. At growing of the crystal, a light from a light source is emitted to a crystal growing film of the crystal. Intensity of a light reflected from the crystal growing film and received by a photo detector is measured. Charge amounts of the respective raw-material gasses are controlled by a control system on the basis of a change in the reflected-light intensity, thereby controlling a growing rate of the growing film.
    Type: Grant
    Filed: July 15, 1993
    Date of Patent: November 7, 1995
    Assignees: Research Development Corporation, Nobuaki Manada, Toru Kurabayashi, Jun-Ichi Nishizawa
    Inventors: Nobuaki Manada, Junji Ito, Toru Kurabayashi, Jun-ichi Nishizawa