Patents by Inventor Nobuaki Ohgushi

Nobuaki Ohgushi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Differential pumping system and exposure apparatus
    Patent number: 6891172
    Abstract: A differential pumping system includes a first chamber for storing a light source that emits pulsed light, a first exhaust unit for exhausting said first chamber, a second chamber being connectible to the first chamber to receive the pulsed light, a second exhaust unit for exhausting said second chamber, and a connection control mechanism between the first and second chambers for connecting the first chamber to the second chamber when the pulsed light emits, and for disconnecting the first chamber from the second chamber when the pulsed light does not emit.
    Type: Grant
    Filed: August 28, 2003
    Date of Patent: May 10, 2005
    Assignee: Canon Kabushiki Kaisha
    Inventors: Nobuaki Ohgushi, Akira Miyake, Takayuki Hasegawa, Jun Ito
  • Differential pumping system and exposure apparatus
    Publication number: 20040046949
    Abstract: A differential pumping system includes a first chamber for storing a light source that emits pulsed light, a first exhaust unit for exhausting said first chamber, a second chamber being connectible to the first chamber to receive the pulsed light, a second exhaust unit for exhausting said second chamber, and a connection control mechanism between the first and second chambers for connecting the first chamber to the second chamber when the pulsed light emits, and for disconnecting the first chamber from the second chamber when the pulsed light does not emit.
    Type: Application
    Filed: August 28, 2003
    Publication date: March 11, 2004
    Inventors: Nobuaki Ohgushi, Akira Miyake, Takayuki Hasegawa, Jun Ito