Patents by Inventor Nobuaki Okita

Nobuaki Okita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11361979
    Abstract: A substrate processing apparatus includes a substrate holding portion which holds a substrate W. The substrate holding portion includes two movable holding pins and two fixed holding pins which sandwich the substrate. The substrate processing apparatus includes two support pins which support the substrate W held by the substrate holding portion from below. Each of the support pins has an inner portion which overlaps the substrate held by the substrate holding portion in a vertical direction. An upper end of the support pin is on a side below an overlapping portion of the substrate which overlaps the inner portion in the vertical direction.
    Type: Grant
    Filed: December 24, 2018
    Date of Patent: June 14, 2022
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Takayuki Nishida, Nobuaki Okita
  • Publication number: 20220088793
    Abstract: A substrate processing apparatus includes a substrate processor and a substrate transporter. The substrate processor includes an upper holding device and a lower holding device configured to be capable of holding a substrate. In the substrate processor, the lower holding device is provided below the upper holding device. Therefore, a height position at which a substrate can be held by the upper holding device is different from a height position at which the substrate can be held by the lower holding device. The substrate transporter has first and second hands that hold a substrate. The second hand is located farther downwardly than the first hand. A substrate is received from or transferred to the upper holding device by the first hand. A substrate is received from or transferred to the lower holding device by the second hand.
    Type: Application
    Filed: August 18, 2021
    Publication date: March 24, 2022
    Inventors: Tomoyuki SHINOHARA, Yoshifumi OKADA, Nobuaki OKITA
  • Publication number: 20220093420
    Abstract: A first substrate holder holds an outer peripheral end of a substrate. A second substrate holder holds a lower-surface center region of the substrate by suction at a position farther downward than the first substrate holder. The second substrate holder and the lower-surface brush are provided on a mobile base that is movable in a horizontal direction. The mobile base is moved between a position at which the lower-surface brush is opposite to a lower-surface outer region of the substrate and a position at which the lower-surface brush is opposite to the lower-surface center region of the substrate. The lower-surface center region of the substrate held by the first substrate holder is cleaned. At this time, a height position of the substrate is higher than an upper end portion of a processing cup. The lower-surface outer region of the substrate held by the second substrate holder is cleaned. At this time, a height position of the substrate is lower than the upper end portion of the processing cup.
    Type: Application
    Filed: September 15, 2021
    Publication date: March 24, 2022
    Inventors: Tomoyuki SHINOHARA, Yoshifumi OKADA, Nobuaki OKITA, Hiroshi KATO, Takashi SHINOHARA
  • Publication number: 20220023923
    Abstract: A substrate processing device includes: a chamber; a substrate processing mechanism that has a holding member, and discharges a processing fluid onto a substrate held by the holding member; a joint pipe that has a lower opening provided below the holding member, and an upper opening provided above the holding member, and is disposed such that at least part of the joint pipe from the lower opening to the upper opening passes through the outside of the chamber; and an air flow generator that is provided in the joint pipe. The air flow generator circulates an atmosphere in the chamber by discharging the atmosphere in the chamber from the lower opening to the joint pipe to allow the atmosphere to pass through the joint pipe, thereby introducing the atmosphere again into the chamber via the upper opening so that a downflow of the atmosphere occurs in the chamber.
    Type: Application
    Filed: October 5, 2021
    Publication date: January 27, 2022
    Inventors: Nobuaki OKITA, Joichi NISHIMURA
  • Patent number: 11114302
    Abstract: A substrate processing apparatus includes an upper cup part including a first tubular portion and a second tubular portion that are formed each in a tubular shape capable of surrounding a substrate held by a substrate holder, the second tubular portion being connected to an upper side of the first tubular portion. The substrate processing apparatus also includes a cup moving unit that moves the upper cup part in a vertical direction with respect to the substrate holder to stop the upper cup part at each of a position where the first tubular portion surrounds the substrate, and a position where the second tubular portion surrounds the substrate.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: September 7, 2021
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Shotaro Tsuda, Nobuyasu Hiraoka, Nobuaki Okita, Takayuki Nishida
  • Patent number: 11101146
    Abstract: A protective disk is disposed between a spin base and a substrate W and is capable of being raised and lowered between a separated position which is separated downward from the substrate W and a near position which is nearer to the substrate than the separated position. An upper surface of the protective disk has an inner surface which is provided on an inner side of a plurality of holding pins in a radial direction and a flat surface which is provided on an outer side of the inner surface in the radial direction and is provided above the inner surface. The flat surface faces a lower surface of a part on an inner side of an outer circumferential end in the radial direction, in a circumferential edge portion of the substrate.
    Type: Grant
    Filed: December 22, 2018
    Date of Patent: August 24, 2021
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Nobuaki Okita, Ryo Muramoto, Takayuki Nishida
  • Publication number: 20190333771
    Abstract: A substrate processing apparatus includes an upper cup part including a first tubular portion and a second tubular portion that are formed each in a tubular shape capable of surrounding a substrate held by a substrate holder, the second tubular portion being connected to an upper side of the first tubular portion. The substrate processing apparatus also includes a cup moving unit that moves the upper cup part in a vertical direction with respect to the substrate holder to stop the upper cup part at each of a position where the first tubular portion surrounds the substrate, and a position where the second tubular portion surrounds the substrate.
    Type: Application
    Filed: November 22, 2017
    Publication date: October 31, 2019
    Inventors: Shotaro TSUDA, Nobuyasu HIRAOKA, Nobuaki OKITA, Takayuki NISHIDA
  • Publication number: 20190252214
    Abstract: A protective disk is disposed between a spin base and a substrate W and is capable of being raised and lowered between a separated position which is separated downward from the substrate W and a near position which is nearer to the substrate than the separated position. An upper surface of the protective disk has an inner surface which is provided on an inner side of a plurality of holding pins in a radial direction and a flat surface which is provided on an outer side of the inner surface in the radial direction and is provided above the inner surface. The flat surface faces a lower surface of a part on an inner side of an outer circumferential end in the radial direction, in a circumferential edge portion of the substrate.
    Type: Application
    Filed: December 22, 2018
    Publication date: August 15, 2019
    Applicant: SCREEN Holdings Co., Ltd.
    Inventors: Nobuaki OKITA, Ryo MURAMOTO, Takayuki NISHIDA
  • Publication number: 20190244835
    Abstract: A substrate processing apparatus includes a substrate holding portion which holds a substrate W. The substrate holding portion includes two movable holding pins and two fixed holding pins which sandwich the substrate. The substrate processing apparatus includes two support pins which support the substrate W held by the substrate holding portion from below. Each of the support pins has an inner portion which overlaps the substrate held by the substrate holding portion in a vertical direction. An upper end of the support pin is on a side below an overlapping portion of the substrate which overlaps the inner portion in the vertical direction.
    Type: Application
    Filed: December 24, 2018
    Publication date: August 8, 2019
    Applicant: SCREEN Holdings Co., Ltd.
    Inventors: Takayuki NISHIDA, Nobuaki OKITA
  • Publication number: 20190201949
    Abstract: A substrate processing device includes: a chamber; a substrate processing mechanism that has a holding member, and discharges a processing fluid onto a substrate held by the holding member; a joint pipe that has a lower opening provided below the holding member, and an upper opening provided above the holding member, and is disposed such that at least part of the joint pipe from the lower opening to the upper opening passes through the outside of the chamber; and an air flow generator that is provided in the joint pipe. The air flow generator circulates an atmosphere in the chamber by discharging the atmosphere in the chamber from the lower opening to the joint pipe to allow the atmosphere to pass through the joint pipe, thereby introducing the atmosphere again into the chamber via the upper opening so that a downflow of the atmosphere occurs in the chamber.
    Type: Application
    Filed: September 4, 2017
    Publication date: July 4, 2019
    Applicant: SCREEN Holdings Co., Ltd.
    Inventors: Nobuaki OKITA, Joichi NISHIMURA
  • Publication number: 20190041743
    Abstract: A substrate processing apparatus includes a substrate holding rotating mechanism that holds a substrate in a horizontal posture and rotates the substrate about the vertical rotating axis passing through a principal surface of the substrate, a brush to be abutted with the principal surface of the substrate held by the substrate holding rotating mechanism to clean the principal surface of the substrate, a first nozzle that discharges a processing liquid to the principal surface of the substrate held by the substrate holding rotating mechanism, and a second nozzle that discharges the processing liquid to a downstream adjacent region adjacent to an abutment region where the brush is abutted with the principal surface of the substrate from the downstream side of the rotating direction of the substrate on the principal surface of the substrate held by the substrate holding rotating mechanism.
    Type: Application
    Filed: March 9, 2017
    Publication date: February 7, 2019
    Inventors: Nobuaki OKITA, Takashi SHINOHARA
  • Publication number: 20080111891
    Abstract: When a shot reproduction command of a preset function is given from a platform controller 12 and a zoom position of a shot to be reproduced is closer to the wide side than a current position, CPU 42 of a platform main body 16 performs driving of the zoom prior to driving of the pan/tilt. On the contrary, when the zoom position of the shot to be reproduced is closer to the telephoto side than the current position, CPU 42 performs the driving of the pan/tilt prior to the driving of the zoom.
    Type: Application
    Filed: November 9, 2007
    Publication date: May 15, 2008
    Inventors: Kazuyuki KURITA, Nobuaki Okita
  • Patent number: 5920674
    Abstract: A video signal editing apparatus has a simplified configuration and still can edit a number of video signals in an efficient way. The video signal editing apparatus performs an editing operation by using video signal combined to display a plurality of moving scenes on a single screen of a video display. The apparatus includes a first signal path 40 transmitting all video signals, a signal extracting device for extracting a desired video signal out of the transmitted video signals for a scene selected from the displayed moving scenes, a second path having a pair of image memories for storing the extracted video signal, a storage device for storing editing data concerning the timing, the mode and the duration of time of switching moving scenes, a CUE signal and other editing data in synchronism with the time base of the video signals and a data controller for reproducing and transferring editing data.
    Type: Grant
    Filed: May 29, 1997
    Date of Patent: July 6, 1999
    Assignee: Xecoo Corporation
    Inventors: Nobuaki Okita, Shunsuke Ishida