Abstract: A method for etching a ruthenium film includes a first step of etching the ruthenium film by plasma processing using oxygen-containing gas, and a second step of etching the ruthenium film by plasma processing using chlorine-containing gas. The first step and the second step are alternately performed. In the first step and the second step, the ruthenium film is etched at a target control temperature for a target processing time that are determined based on a pre-obtained relation between an etching amount per one cycle including the first step and the second step as a set, a control temperature of the ruthenium film, and processing times of each of the first step and the second step.

Abstract: A method for etching a ruthenium film includes a first step of etching the ruthenium film by plasma processing using oxygen-containing gas, and a second step of etching the ruthenium film by plasma processing using chlorine-containing gas. The first step and the second step are alternately performed. In the first step and the second step, the ruthenium film is etched at a target control temperature for a target processing time that are determined based on a pre-obtained relation between an etching amount per one cycle including the first step and the second step as a set, a control temperature of the ruthenium film, and processing times of each of the first step and the second step.

Abstract: An automotive interior component includes a base member including a front surface, a back surface, and a side surface provided between the front surface and the back surface; and a skin material integrated with the base member. The skin material is integrated with the front surface and the side surface. The side surface of the base member is continuous to the front surface of the base member while forming an acute angle of angle ? therewith. The skin material includes an end surface extending along the side surface of the base member. The present invention provides the automotive interior component with a neat appearance.

Abstract: A method for etching a ruthenium film includes a first step of etching the ruthenium film by plasma processing using oxygen-containing gas, and a second step of etching the ruthenium film by plasma processing using chlorine-containing gas. The first step and the second step are alternately performed. In the first step and the second step, the ruthenium film is etched at a target control temperature for a target processing time that are determined based on a pre-obtained relation between an etching amount per one cycle including the first step and the second step as a set, a control temperature of the ruthenium film, and processing times of each of the first step and the second step.

Abstract: An automobile interior part includes a base, which has a surface and a back surface, and also includes a skin, which has a back surface integrally laminated on the surface of the base. The automobile interior part has a main body and a flange that is continued to the main body. The skin has a fold part that is formed between the main body and the flange. The base has a body base that constitutes the main body and also has a flange base that constitutes the flange and that is separated from the body base at the fold part. The back surface of the skin between the body base and the flange base is exposed along the fold part. The automobile interior part has a good appearance.

Abstract: An automobile interior part includes a base, which has a surface and a back surface, and also includes a skin, which has a back surface integrally laminated on the surface of the base. The automobile interior part has a main body and a flange that is continued to the main body. The skin has a fold part that is formed between the main body and the flange. The base has a body base that constitutes the main body and also has a flange base that constitutes the flange and that is separated from the body base at the fold part. The back surface of the skin between the body base and the flange base is exposed along the fold part. The automobile interior part has a good appearance.

Abstract: A method for etching a ruthenium film includes a first step of etching the ruthenium film by plasma processing using oxygen-containing gas, and a second step of etching the ruthenium film by plasma processing using chlorine-containing gas. The first step and the second step are alternately performed. In the first step and the second step, the ruthenium film is etched at a target control temperature for a target processing time that are determined based on a pre-obtained relation between an etching amount per one cycle including the first step and the second step as a set, a control temperature of the ruthenium film, and processing times of each of the first step and the second step.

Abstract: An automotive interior component includes a base member including a front surface, a back surface, and a side surface provided between the front surface and the back surface; and a skin material integrated with the base member. The skin material is integrated with the front surface and the side surface. The side surface of the base member is continuous to the front surface of the base member while forming an acute angle of angle ? therewith. The skin material includes an end surface extending along the side surface of the base member. The present invention provides the automotive interior component with a neat appearance.

Abstract: An image processing device that rotates an image according to the inclination of a line segment included in the image, includes an evaluation unit 106 that evaluates a plurality of line segments whose inclinations are different, on the basis of each of a plurality of different decision standards, and a selection unit 106 that selects, on the basis of the results of the plurality of evaluations, from among the plurality of line segments, a line segment on the basis of which the image is to be rotated.

Abstract: A sputtering method includes disposing a plurality of thin and long deposition regions such that the thin and long deposition regions each cross in a first direction a circular reference region having a diameter equal to that of a semiconductor wafer, and are arranged at predetermined intervals in a second direction perpendicular to the first direction; disposing one of the plurality of thin and long deposition regions such that one side of sides thereof extending in the first direction passes through a substantial center of the circular reference region; disposing another of the plurality of thin and long deposition regions such that one side of sides thereof extending in the first direction passes through a substantial edge of the circular reference region; setting each of widths of the plurality of thin and long deposition regions such that a value obtained by summing the widths of the plurality of thin and long deposition regions in the second direction is substantially equal to a radius of the circular r

Abstract: An image processing device that rotates an image according to the inclination of a line segment included in the image, includes an evaluation unit 106 that evaluates a plurality of line segments whose inclinations are different, on the basis of each of a plurality of different decision standards, and a selection unit 106 that selects, on the basis of the results of the plurality of evaluations, from among the plurality of line segments, a line segment on the basis of which the image is to be rotated

Abstract: A reflector member of the present invention includes a silver thin film formed on a substrate and a silicon nitride protection film formed on the silver thin film. The silver thin film has the (111) orientation as the principal plane orientation. Preferably, 99% or more of the silver thin film has the (111) orientation as the principal plane orientation. The thickness of the silver thin film is in a range of 100 nm to 350 nm.

Abstract: Electronic equipment, for enabling a plurality types of batteries to be selectively used, which is designed in such a way that discharge characteristic data of a plurality types of batteries to be used is previously stored in a memory unit, a battery including a resistor indicating the type of the battery is fitted to the electronic equipment, the type of the battery is identified on the basis of a resistance value of the resistor, the discharge characteristic data of the battery corresponding to the identified type of battery is read out from the memory unit, a battery voltage is compared with the discharge characteristic data thus read out and a remaining power of the battery is calculated to display the information relating to the remaining power thus calculated.