Abstract: A plasma processing apparatus includes a balun having a first unbalanced terminal, a second unbalanced terminal, a first balanced terminal, and a second balanced terminal, a grounded vacuum container, a first electrode electrically connected to the first balanced terminal, a second electrode electrically connected to the second balanced terminal, an impedance matching circuit, a first power supply connected to the balun via the impedance matching circuit, and configured to supply a high frequency to the first electrode via the impedance matching circuit and the balun, a low-pass filter, and a second power supply configured to supply a voltage to the first electrode via the low-pass filter.

Abstract: A method of manufacturing a heating block includes a first step of providing a ceramic material to a mold, a second step of sintering the ceramic material and forming a plate, and a third step of machining the plate. A shaft is connected to the plate in a fourth step, and rods are bonded to the plate in a fifth step of the method. Heating blocks and semiconductor processing systems having heating blocks are also described.

Abstract: Examples of an apparatus operating method includes providing gas to an inside of a reactor chamber to perform processing on a substrate in the inside of the reactor chamber, and providing plasma, not via the reactor chamber, to a discharge line communicating with the reactor chamber or a dry pump communicating with the discharge line during loading or unloading of the substrate to/from the reactor chamber to perform cleaning of at least one of the discharge line and the dry pump.

Abstract: Examples of a cooling system include a flow channel through which a cooling medium flows, a valve that is provided in the flow channel and configured to adjusts a flow rate of the cooling medium, a thermometer for measuring temperature of the cooling medium, a flowmeter for measuring a flow rate of the cooling medium passing through the valve, and a controller for determining cooling capacity of the cooling medium from measurement results of the thermometer and the flowmeter, and adjusting the valve so that the cooling capacity of the cooling medium approaches to a target value when the determined cooling capacity is different from the target value.

Abstract: Examples of a cooling system include a flow channel through which a cooling medium flows, a valve that is provided in the flow channel and configured to adjusts a flow rate of the cooling medium, a thermometer for measuring temperature of the cooling medium, a flowmeter for measuring a flow rate of the cooling medium passing through the valve, and a controller for determining cooling capacity of the cooling medium from measurement results of the thermometer and the flowmeter, and adjusting the valve so that the cooling capacity of the cooling medium approaches to a target value when the determined cooling capacity is different from the target value.

Abstract: A portable collapsible boat comprises a body formed of a bottom and a pair of sides which are integrally molded with the bottom. The sides are elastically flexible so as to be foldable to horizontal positions overlying the bottom, and unfoldable to upright positions. A bow support plate and a stern support plate can be inserted generally horizontally between upper portions of the sides to retain the sides in their unfolded state. The support plates are pivotably connected to the sides so as to be automatically lowered to positions inside of the boat when the sides are folded, and automatically raised to positions adjacent upper edges of the sides when the sides are unfolded.