Abstract: In a solution change processing which comprises: changing a processing solution stored in a processing bath, specifically deionized water for sulfuric acid; and controlling the temperature of sulfuric acid so changed to a predetermined temperature, first, deionized water is discharged from a processing bath and an external bath. Subsequently, sulfuric acid is supplied from a supplying nozzle to the external bath. Subsequently, an upper circulating process is started by opening and closing a predetermined valve, while allowing a pump and a temperature controller be operated. At the time the temperature of a processing solution is higher than a predetermined value, an inside circulating process is carried out by opening and closing a predetermined valve, while having the pump and the temperature controller keep operating.

Abstract: In a solution change processing which comprises: changing a processing solution stored in a processing bath, specifically deionized water for sulfuric acid; and controlling the temperature of sulfuric acid so changed to a predetermined temperature, first, deionized water is discharged from a processing bath and an external bath. Subsequently, sulfuric acid is supplied from a supplying nozzle to the external bath. Subsequently, an upper circulating process is started by opening and closing a predetermined valve, while allowing a pump and a temperature controller be operated. At the time the temperature of a processing solution is higher than a predetermined value, an inside circulating process is carried out by opening and closing a predetermined valve, while having the pump and the temperature controller keep operating.

Abstract: In liquid exchange processing for exchanging a processing liquid retained in a processing bath from pure water to sulfuric acid and controlling the exchanged sulfuric acid at a predetermined temperature, firstly, pure water is discharged from the processing bath and an external bath. Then, sulfuric acid is supplied from a supply nozzle into the external bath. Then, timing to start circulation processing for circulating sulfuric acid from the external bath to the processing bath, and timing to start temperature control of the processing liquid are determined according to the amount of sulfuric acid retained in the external bath, which amount is obtained from a detection result by a pressure sensor. Accordingly, the temperature control can be started before the supply from the supply nozzle is completed. This shortens the time required for the liquid exchange processing.