Abstract: Provided is a highly reliable optical filtering device used as a spatial filter for an optical inspection apparatus and configured to prevent a shutter from sticking to a wall surface of a shutter opening. The optical filtering device includes the shutter openable and closeable by voltage control and a substrate having the shutter opening serving as a movable range of the shutter, in which the substrate includes a sticking prevention part configured to prevent the shutter from sticking to the wall surface of the shutter opening when the shutter is opened.

Abstract: To improve alignment accuracy of an optical element. An alignment device includes an optical element, a base portion that holds the optical element and is supported in a state movable in an X-direction and a Y-direction intersecting with the X-direction, a mechanical driving unit driven by a pressure of a fluid, a member in contact with the base portion pushed by the mechanical driving unit, a stage portion that holds the member and is supported in a state movable in the Y-direction, the mechanical driving unit driven by a pressure of a fluid, and a member in contact with the stage portion pushed by the mechanical driving unit.

Abstract: Regarding a microscope system, a technique capable of suitably achieving a focusing on a surface of a sample is provided. The microscope system includes an irradiation optical system (laser light source 101 or the like) that irradiates a surface of a sample 3 on a stage 104 with light from an oblique direction, an observation optical system (camera 112 or the like) that forms an image of scattered light from the surface of the sample 3, a focus mechanism (piezo stage 106 or the like) that changes a height position of focus with respect to the surface of the sample 3, and a computer system 100 that acquires an image from the observation optical system.

Abstract: To improve alignment accuracy of an optical element. An alignment device includes an optical element, a base portion that holds the optical element and is supported in a state movable in an X-direction and a Y-direction intersecting with the X-direction, a mechanical driving unit driven by a pressure of a fluid, a member in contact with the base portion pushed by the mechanical driving unit, a stage portion that holds the member and is supported in a state movable in the Y-direction, the mechanical driving unit driven by a pressure of a fluid, and a member in contact with the stage portion pushed by the mechanical driving unit.

Abstract: A defect observation device detects a defect with high accuracy regardless of a defect size. One imaging configuration for observing an observation target on a sample is selected from an optical microscope, an optical microscope, and an electron microscope, and an imaging condition of the selected imaging configuration is controlled.

Abstract: Provided is a defect detection device including an illumination unit including a condenser lens and a plurality of light beam synthesis units, and a detection unit detecting scattered light generated on a sample by the illumination unit. The condenser lens condenses a plurality of light beams, emitted onto the sample and having substantially the same wavelength and substantially the same polarization, on the sample. The plurality of light beam synthesis units bring the plurality of light beams close to each other and make the light beams have light paths parallel to the optical axis of the condenser lens.

Abstract: A defect observation device detects a defect with high accuracy regardless of a defect size. One imaging configuration for observing an observation target on a sample is selected from an optical microscope, an optical microscope, and an electron microscope, and an imaging condition of the selected imaging configuration is controlled.

Abstract: Provided is a defect detection device including an illumination unit including a condenser lens and a plurality of light beam synthesis units, and a detection unit detecting scattered light generated on a sample by the illumination unit. The condenser lens condenses a plurality of light beams, emitted onto the sample and having substantially the same wavelength and substantially the same polarization, on the sample. The plurality of light beam synthesis units bring the plurality of light beams close to each other and make the light beams have light paths parallel to the optical axis of the condenser lens.