Abstract: A vacuum pump comprises: a rotor; a stator; a rolling bearing configured to support a rotor shaft provided at the rotor; and a vibration sensor configured to detect vibration of the rolling bearing.

Abstract: A power source integrated vacuum pump configured such that a pump main body and a pump power source device are integrated together, comprises: a substrate which is provided at the pump power source device and on which an electronic component is mounted; a cooling device having a cooling surface fixed in contact with the substrate; and a heat insulating member having a smaller coefficient of thermal conductivity than that of a material forming the cooling surface and covering a cooling surface region to which the substrate is not fixed.

Abstract: A vacuum pump includes a pump device including a pump motor, an exhaust function section configured to exhaust sucked gas, and at least two direct current heaters, and a pump-integrated power source device. The pump-integrated power source device includes a pump control section, a pump power source configured to supply power to the pump control section, a direct current heater control section configured to control the two direct current heaters, and a direct current heater power source configured to supply power to the direct current heater control section.

Abstract: A turbo-molecular pump comprises a cylindrical rotor to be rotatably driven by a motor; a cylindrical stator provided corresponding to the rotor; a heater configured to elevate a temperature of the stator to a target temperature; a temperature sensor configured to detect the temperature of the stator; and a control section. A rotation start command is input after start of energization of the heater, the control section stops rotary driving of the rotor at a rated rotation speed until the temperature of the stator reaches a predetermined temperature set lower than the target temperature and begins the rotary driving at the rated rotation speed when the temperature of the stator exceeds the predetermined temperature.

Abstract: A vacuum pump comprises: a rotor; a stator; a rolling bearing configured to support a rotor shaft provided at the rotor; and a vibration sensor configured to detect vibration of the rolling bearing.

Abstract: A vacuum pump control device comprises: a pump controller configured to control a vacuum pump; a cooling device configured to cool the pump controller; a housing configured to house the pump controller; a temperature sensor configured to detect, in the housing, a temperature at one of a first position or a second position having a higher temperature than that at the first position; a humidity sensor configured to detect a humidity at the second position in the housing; a temperature estimator configured to estimate a temperature at the other one of the first position or the second position based on the temperature detected by the temperature sensor; and a cooling controller configured to control execution and stop of cooling operation by the cooling device based on the temperature estimated by the temperature estimator, the temperature detected by the temperature sensor, and the humidity detected by the humidity sensor.

Abstract: A power source integrated vacuum pump configured such that a pump main body and a pump power source device are integrated together, comprises: a substrate which is provided at the pump power source device and on which an electronic component is mounted; a cooling device having a cooling surface fixed in contact with the substrate; and a heat insulating member having a smaller coefficient of thermal conductivity than that of a material forming the cooling surface and covering a cooling surface region to which the substrate is not fixed.

Abstract: A vacuum pump control device comprises: a pump controller configured to control a vacuum pump; a cooling device configured to cool the pump controller; a housing configured to house the pump controller; a temperature sensor configured to detect, in the housing, a temperature at one of a first position or a second position having a higher temperature than that at the first position; a humidity sensor configured to detect a humidity at the second position in the housing; a temperature estimator configured to estimate a temperature at the other one of the first position or the second position based on the temperature detected by the temperature sensor; and a cooling controller configured to control execution and stop of cooling operation by the cooling device based on the temperature estimated by the temperature estimator, the temperature detected by the temperature sensor, and the humidity detected by the humidity sensor.

Abstract: A vacuum pump comprises: a pump device including a pump motor, an exhaust function section configured to exhaust sucked gas, and at least two direct current heaters; and a pump-integrated power source device including a pump control section, a pump power source configured to supply power to the pump control section, a direct current heater control section configured to control the two direct current heaters, and a direct current heater power source configured to supply power to the direct current heater control section.

Abstract: A turbo-molecular pump comprises a cylindrical rotor to be rotatably driven by a motor; a cylindrical stator provided corresponding to the rotor; a heater configured to elevate a temperature of the stator to a target temperature; a temperature sensor configured to detect the temperature of the stator; and a control section. A rotation start command is input after start of energization of the heater, the control section stops rotary driving of the rotor at a rated rotation speed until the temperature of the stator reaches a predetermined temperature set lower than the target temperature and begins the rotary driving at the rated rotation speed when the temperature of the stator exceeds the predetermined temperature.

Abstract: A monitoring device for monitoring power consumption of a magnetic bearing vacuum pump rotatably driven by a motor and configured such that a rotor is magnetically levitated and supported by a magnetic bearing, comprises: a calculator configured to calculate the power consumption of the magnetic bearing vacuum pump, the power consumption of the magnetic bearing vacuum pump being obtained by adding power consumption of the motor based on a motor rotational speed and a motor current value and power consumption of the magnetic bearing together; and a display controller configured to display, on a display device, the power consumption of the magnetic bearing vacuum pump calculated by the calculator.

Abstract: A vacuum pump device comprises: a power supply device including a dew condensation detector configured to detect dew condensation, a regenerative braking resistance, and a controller configured to energize the regenerative braking resistance; a cooling system using coolant; and a pump main body including a motor rotatably driven by the power supply device. When the dew condensation detector detects the dew condensation, the controller energizes the regenerative braking resistance to heat an inside of the power supply device.

Abstract: A motor controller comprises: a rotation angle estimation unit for estimating and computing a rotation angle of a motor repeatedly based on the current and voltage of the motor without using a motor rotation angle detector; a speed calculation unit for calculating the period of the signal waveform of the rotation angle that is repeatedly estimated and calculated by the rotation angle estimation unit and for calculating an actual rotational speed of the motor based on the period; a drive signal generating unit for generating a drive signal to drive and control the motor based on at least a deviation between the actual rotational speed and a target rotational speed and the rotation angle; and a switching circuit that is switched based on the drive signal to provide drive power to the motor.

Abstract: A vacuum pump device comprises: a power supply device including a dew condensation detector configured to detect dew condensation, a regenerative braking resistance, and a controller configured to energize the regenerative braking resistance; a cooling system using coolant; and a pump main body including a motor rotatably driven by the power supply device. When the dew condensation detector detects the dew condensation, the controller energizes the regenerative braking resistance to heat an inside of the power supply device.

Abstract: A monitoring device for monitoring power consumption of a magnetic bearing vacuum pump rotatably driven by a motor and configured such that a rotor is magnetically levitated and supported by a magnetic bearing, comprises: a calculator configured to calculate the power consumption of the magnetic bearing vacuum pump, the power consumption of the magnetic bearing vacuum pump being obtained by adding power consumption of the motor based on a motor rotational speed and a motor current value and power consumption of the magnetic bearing together; and a display controller configured to display, on a display device, the power consumption of the magnetic bearing vacuum pump calculated by the calculator.

Abstract: A motor controller comprises: a rotation angle estimation unit for estimating and computing a rotation angle of a motor repeatedly based on the current and voltage of the motor without using a motor rotation angle detector; a speed calculation unit for calculating the period of the signal waveform of the rotation angle that is repeatedly estimated and calculated by the rotation angle estimation unit and for calculating an actual rotational speed of the motor based on the period; a drive signal generating unit for generating a drive signal to drive and control the motor based on at least a deviation between the actual rotational speed and a target rotational speed and the rotation angle; and a switching circuit that is switched based on the drive signal to provide drive power to the motor.

Abstract: A condensation sensor is provided within a power supply device that is provided integratedly with a vacuum pump main unit. When the condensation sensor detects condensation within the power supply device, a CPU closes a cooling water valve. This stops the flow of cooling water that flows through the interior of the power supply device, through a cooling water duct.

Abstract: A condensation sensor is provided within a power supply device that is provided integratedly with a vacuum pump main unit. When the condensation sensor detects condensation within the power supply device, a CPU closes a cooling water valve. This stops the flow of cooling water that flows through the interior of the power supply device, through a cooling water duct.

Abstract: An optical tactile sensor has a touch pad and a CCD camera for imaging behavior of the touch pad. A CPU processes image information from the CCD camera, extracts information on the size, shape, and center of gravity of a contact region, and extracts information on the size of a fixation region. The CPU obtains a normal force from the size of the contact region, obtains a tangential force from the shape of the contact region and the center of gravity of the contact region, and obtains a friction coefficient from the ratio of the size of the fixation region to the size of the contact region.

Abstract: A magnetic bearing system for use in a vacuum pump including a motor provided with a rotary blade. The magnetic bearing system including a rotary shaft rotationally holding said rotor, a motor for rotationally driving said rotary shaft, a magnetic levitation section for supporting said rotor relative to a stator through said rotary shaft in a non-contact manner, a rotation detection section for detecting a rotational speed of said rotor, a rotor-temperature detection section for detecting a temperature of said rotor; a carrier-wave generation section for supplying a common carrier wave to each of a plurality of sensors provided in said magnetic levitation section, said rotation detection section and said rotor-temperature detection section, and an A/D conversion section for sampling a sensor signal output from each of said sensors, in synchronization with said carrier wave.