Abstract: A substrate processing apparatus includes a plurality of functional sections 200, 300, 400 and 500 each of which is selectively set in an operating state where an assigned processing thereof is executable on a substrate and a standby state where an energy consumption amount is less than in the operating state, and an apparatus controller 50 which controls a state of each functional section 200, 300, 400, 500 between the operating state and the standby state and causes the functional section in charge of the assigned processing corresponding to a recipe to be set in the operating state and perform the assigned processing in executing the recipe specifying a processing procedure on the substrate.

Abstract: Provided is an air-conditioning apparatus for vehicle including a main frame capable of being assembled without increasing the number of parts and the number of processes. An air-conditioning apparatus for vehicle includes a casing divided into an indoor chamber and an outdoor chamber by a partition plate, the casing including a cover placed on a top thereof, and a refrigeration cycle device placed across the indoor chamber and the outdoor chamber in the casing. Each of side plates, serving as side surfaces of the indoor chamber and the outdoor chamber, of the casing is extruded in one piece of aluminum.

Abstract: A substrate processing apparatus includes a plurality of functional sections 200, 300, 400 and 500 each of which is selectively set in an operating state where an assigned processing thereof is executable on a substrate and a standby state where an energy consumption amount is less than in the operating state, and an apparatus controller 50 which controls a state of each functional section 200, 300, 400, 500 between the operating state and the standby state and causes the functional section in charge of the assigned processing corresponding to a recipe to be set in the operating state and perform the assigned processing in executing the recipe specifying a processing procedure on the substrate.

Abstract: Provided is an air-conditioning apparatus for vehicle including a main frame capable of being assembled without increasing the number of parts and the number of processes. An air-conditioning apparatus for vehicle includes a casing divided into an indoor chamber and an outdoor chamber by a partition plate, the casing including a cover placed on a top thereof, and a refrigeration cycle device placed across the indoor chamber and the outdoor chamber in the casing. Each of side plates, serving as side surfaces of the indoor chamber and the outdoor chamber, of the casing is extruded in one piece of aluminum.

Abstract: A piezoelectric loudspeaker using a thin plate of piezoelectric ceramics of a high dielectric constant, and fixing a piezoelectric transducer including a thin plate of piezoelectric ceramic of a high dielectric constant onto a diaphragm stretched on a frame, thereby forming a sound generator.The piezoelectric loudspeaker is so constructed that the resonance frequency of the sound generator is set at the low frequency band side of an audio frequency region and that of a cavity by the frame is set at the high frequency band side, the thin plate piezoelectric ceramic of high dielectric constant being used, so that the piezoelectric loudspeaker is of an ultrathin type and can cover the whole audio frequency region.

Abstract: A piezoelectric loudspeaker having a bending mode piezoelectric diaphragm mounted on a diaphragm stretched across a frame, the piezoelectric diaphragm being supported at its central portion to a support provided at the frame, so that the central portion of piezoelectric diaphragm is stationary free from vibrations, thereby being higher in a sound pressure level and smaller in acoustic distortion than the conventional loudspeaker.