Patents by Inventor Nobuhiko NISHITANI

Nobuhiko NISHITANI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Resist composition and method for producing resist pattern
    Patent number: 11675267
    Abstract: Disclosed is a resist composition including a compound represented by formula (I), a resin having an acid-labile group and an acid generator, the resin having an acid-labile group including at least one selected from the group consisting of a structural unit represented by formula (a1-1) and a structural unit represented by formula (a1-2):
    Type: Grant
    Filed: February 26, 2021
    Date of Patent: June 13, 2023
    Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Yuji Kita, Nobuhiko Nishitani, Koji Ichikawa
  • RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
    Publication number: 20210311392
    Abstract: Disclosed is a resist composition including a compound represented by formula (I), a resin having an acid-labile group and an acid generator, the resin having an acid-labile group including at least one selected from the group consisting of a structural unit represented by formula (a1-1) and a structural unit represented by formula (a1-2):
    Type: Application
    Filed: February 26, 2021
    Publication date: October 7, 2021
    Applicant: SUMITOMO CHEMICAL COMPANY, LIMITED
    Inventors: Yuji KITA, Nobuhiko NISHITANI, Koji ICHIKAWA