Abstract: An electrode body for batteries of the invention includes a first metal portion configured to include metal as an electrode active material as a main component, a first structural member configured to cover a part of a surface of the first metal portion, and a coating member configured to cover the other part of the surface of the first metal portion. The first metal portion, the first structural member, and the coating member are provided such that the first metal portion is divided between the first structural member and the coating member or the coating member is separated from the first metal portion to expose the metal included in the first metal portion.

Abstract: A method of positioning a semiconductor wafer includes the steps of fixing a semiconductor wafer on a wafer stage, the semiconductor wafer including a plurality of shot areas regularly arranged thereon, and positioning each of the shot areas in turn to an exposure position by a step and repeat system, wherein a step pitch to move each of the shot areas to the exposure position is adjusted by a magnitude of warpage of the semiconductor wafer.

Abstract: An alignment sensor measures the distortion of a bed shot, and a processing section compares the measured distortion with a plurality of distortions of the current stage shots stored in a memory device in advance to select the most appropriate current stage shot. According to the selected result, a drive control section drives and rotates the motor, changes the relative angle between the projector lens and the reticle to execute exposure process. This provides, in manufacture of semiconductor devices using a plurality of projection aligners, projection aligners and a method of manufacturing semiconductor devices capable of removing limitations on the number of projection aligners and achieving a high throughput in manufacture.