Patents by Inventor Nobuhiko Shirahama

Nobuhiko Shirahama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
    Publication number: 20230100292
    Abstract: A plasma processing method includes (a) forming a first protective film on a surface of an inner member of a chamber by a first processing gas including a precursor gas that does not contain halogen; and (b) performing plasma processing on a processing target that is carried in inside the chamber by a plasma of a second processing gas after the first protective film is formed on the surface of the member.
    Type: Application
    Filed: September 28, 2022
    Publication date: March 30, 2023
    Applicant: Tokyo Electron Limited
    Inventors: KYURI MOTOKAWA, Yuya Minoura, Muneyuki Omi, Koki Tanaka, Ryu Nagai, Nobuhiko Shirahama