Abstract: A plasma processing apparatus includes an evacuatable processing vessel; a workpiece mount base for mounting thereon an object to be processed; a microwave transmitting plate provided in an opening of a ceiling of the processing vessel; a planar antenna member for supplying a microwave into the processing vessel via the microwave transmitting plate; a shield lid grounded to cover a top of the planar antenna member; a waveguide for guiding the microwave to the planar antenna member; a member elevating mechanism for relatively varying a vertical distance between the planar antenna member and the shield lid; a tuning rod insertable into the waveguide; a tuning rod driving mechanism for moving the tuning rod to adjust an insert amount thereof; and a matching control section for controlling an elevation amount of the planar antenna member and the insert amount of the tuning rod to obtain a matching adjustment.

Abstract: A plasma processor with a microwave generating source mounted integrally on a shield lid by miniaturizing a matching circuit.

Abstract: A pressurized fluid supply hose which conducts pressurized fluid from a pump to a fluid operating device is disclosed. A nipple is caulked on an outer surface of a spiral tube formed by spirally winding two band members. By a caulking process, the nipple is formed at its inner surface with a flat portion and two taper portions. The taper portions are successive to the flat portion and sloped to gradually increase the inner diameter toward both ends of the nipple. The outer surface of the spiral tube is also deformed along the flat portion and the taper portions to be secured to the inner surface of the nipple. The spiral tube with the nipple is inserted into a flexible rubber hose and fixed to the rubber hose at a position corresponding to the nipple. Since the nipple is caulked so that the caulked amount of the spiral tube is gradually decreased toward the both ends of the nipple, a large clearance is prevented from being made between two outer and inner band members.