Abstract: Provided is a highly reliable optical filtering device used as a spatial filter for an optical inspection apparatus and configured to prevent a shutter from sticking to a wall surface of a shutter opening. The optical filtering device includes the shutter openable and closeable by voltage control and a substrate having the shutter opening serving as a movable range of the shutter, in which the substrate includes a sticking prevention part configured to prevent the shutter from sticking to the wall surface of the shutter opening when the shutter is opened.

Abstract: A skid-type car body carrier carries a transversely oriented car body along a conveying path. The carrier is driven by a drive roller which is biased upwardly and frictionally engages the bottom of a centrally located friction bar mounted underneath the carrier.

Abstract: An interface between an automation host and a plurality of tools is used to perform a processing step. The interface includes a single communications and process behavioral connection interface to the automation host. The interface also includes a plurality of virtual host interfaces. Each virtual host interface from the plurality of virtual host interfaces provides a communications and process behavioral interface to one of the tools in the plurality of tools. The automation host can control and coordinate operation of all tools in the plurality of tools via the single communications and process behavioral connection interface.

Abstract: A skid-type car body carrier carries a transversely oriented car body along a conveying path. The carrier is driven by a drive roller which frictionally engages a centrally located friction bar mounted underneath the carrier.

Abstract: An interface between an automation host and a plurality of tools is used to perform a processing step. The interface includes a single communications and process behavioral connection interface to the automation host. The interface also includes a plurality of virtual host interfaces. Each virtual host interface from the plurality of virtual host interfaces provides a communications and process behavioral interface to one of the tools in the plurality of tools. The automation host can control and coordinate operation of all tools in the plurality of tools via the single communications and process behavioral connection interface.

Abstract: The data of a plurality of attributes of dies on a semiconductor wafer under a parametric test can be managed in a unified manner, and edited and displayed on a real-time basis with one tool. A semiconductor inspection apparatus has a memory for expanding and storing attribute data of dies as data of at least three values for selecting and specifying attributes of dies on a wafer from a plurality of attributes, and a display controller for allowing an operator to select any of the attributes of dies within one displayed image, and reflecting selected attributes immediately as die characteristics in the displayed image. A method of specifying attributes of dies on a wafer in such a semiconductor inspection apparatus is also disclosed.