Abstract: A substrate processing apparatus includes a holder configured to hold a substrate; a driving unit configured to rotate the holder; an inner cup body provided in the holder to surround the substrate held by the holder; a mist guard, surrounding the holder and the inner cup body, configured to be moved up and down; a cleaning liquid supply configured to supply a cleaning liquid; and a controller. The controller is configured to perform: supplying a processing liquid to the substrate from a processing liquid supply, in a state that the substrate is held by the holder and the mist guard is raised; and dispersing, after the supplying of the processing liquid, the cleaning liquid supplied from the cleaning liquid supply to an entire inner peripheral surface of the mist guard, in a state that the substrate is carried out from the holder and the mist guard is raised.

Abstract: A wavelength tunable laser includes a filter region having a wavelength selection function on light from a gain region, wherein the filter region is a Sagnac interferometer and includes two ring resonators. The ring resonator has two optical couplers, and first and second curved waveguides connecting the two optical couplers, each of the two optical couplers is configured to receive input of the light from the gain region through an input-output port, to couple light of a resonant peak to a bar port of the input-output port, and to couple light except light at a resonant peak wavelength to a cross port of the input-output port, and each of radiation waveguides connected to the cross ports of the input-output ports of the two optical couplers has a structure that radiates the light except the light at the resonant peak wavelength to a front surface or a back surface of a substrate.

Abstract: A wavelength tunable laser includes a filter region having a wavelength selection function on light from a gain region, wherein the filter region is a Sagnac interferometer and includes two ring resonators. The ring resonator has two optical couplers, and first and second curved waveguides connecting the two optical couplers, each of the two optical couplers is configured to receive input of the light from the gain region through an input-output port, to couple light of a resonant peak to a bar port of the input-output port, and to couple light except light at a resonant peak wavelength to a cross port of the input-output port, and the first curved waveguide connects the bar ports of the input-output ports of the two optical couplers, and the second curved waveguide connects the cross ports of ports, of two optical couplers, that the first curved waveguide is connected to.

Abstract: A substrate processing apparatus includes a fluid supply unit that supplies a fluid that includes a pressurized vapor or mist of a purified water, a processing liquid supply unit that supplies a processing liquid that includes at least sulfuric acid, and a nozzle that includes a first discharge port that discharges a fluid that is supplied from the fluid supply unit, a second discharge port that discharges a processing liquid that is supplied from the processing liquid supply unit, and a guiding route that is communicated with the first discharge port and the second discharge port and guides a mixed fluid of a fluid that is discharged from the first discharge port and a processing liquid that is discharged from the second discharge port, where a cross-sectional area of the guiding route is greater than a cross-sectional area of the first discharge port.

Abstract: A flush water tank apparatus has a reservoir tank, a discharge valve, a discharge valve hydraulic drive portion configured to drive the discharge valve, and a discharge/vacuum break valve device configured to supply the water supplied from the upstream side to the discharge valve hydraulic drive portion on a downstream side. The discharge valve hydraulic drive portion includes a cylinder, and a piston configured to be moved by a pressure of the water flowing into the cylinder to move the discharge valve. The discharge/vacuum break valve device includes a valve body that operates to discharge the water flowing backward from the discharge valve hydraulic drive portion while opening the upstream side to an atmosphere when the supply of the water from the upstream side is stopped.

Abstract: To provide a connector cleaning tool capable of precisely removing dust even on an end surface of a connector having irregularities. The connector cleaning tool includes a buffer body, and an adhesive body arranged with the buffer body, in which in a case where the connector cleaning tool is pressed toward a connection end surface of a connector on which a guide pin is protrudingly provided, the guide pin is inserted into the buffer body via the adhesive body.

Abstract: An object of the present invention is to provide a cleaner which is excellent in dust removability, has a small amount of adhesive residue and is able to clean sufficiently over the details of unevenness even when cleaning an end face having unevenness, and the present invention provides a cleaner which is excellent in dust removability, has a small amount of adhesive residue and is able to clean sufficiently over the details of unevenness even when cleaning an end face having unevenness by setting a peeling force of an adhesive body to 0.1 to 10 N/20 mm and a hardness of the adhesive body to 12 to 52.

Abstract: To provide a connector cleaning tool capable of precisely removing dust even on an end surface of a connector having irregularities. The connector cleaning tool includes a buffer body, and an adhesive body arranged with the buffer body, in which in a case where the connector cleaning tool is pressed toward a connection end surface of a connector on which a guide pin is protrudingly provided, the guide pin is inserted into the buffer body via the adhesive body.

Abstract: A lens array fabrication method for fabricating a lens array includes: receiving pins (16) of a film attaching instrument (jig) in second guide holes (10) of a film-containing base plate; bonding a placement area and an adhesion layer (F); removing the pins (16); causing a detachment between a first detachment film (C) and a pressure-sensitive adhesive optical film (D); separating three layers (D) to (F) from two layers (B) and (C); receiving the pins (16) in first guide holes (7) of a lens array main unit; fitting a film holding protrusion (15) in a depression part (6); bonding the film (D) to a bonding region (i); removing the pins (16); and causing a detachment between the film (D) and a second detachment film (E).

Abstract: The present invention provides an end-face cleaner for cleaning an end face having a pin projected thereon, comprising an adhesive layer configured to be pierced with a pin, and a support configured to support the adhesive layer and expose a partial surface of the adhesive layer.

Abstract: A lens array fabrication method for fabricating a lens array includes: receiving pins (16) of a film attaching instrument (jig) in second guide holes (10) of a film-containing base plate; bonding a placement area and an adhesion layer (F); removing the pins (16); causing a detachment between a first detachment film (C) and a pressure-sensitive adhesive optical film (D); separating three layers (D) to (F) from two layers (B) and (C); receiving the pins (16) in first guide holes (7) of a lens array main unit; fitting a film holding protrusion (15) in a depression part (6); bonding the film (D) to a bonding region (i); removing the pins (16); and causing a detachment between the film (D) and a second detachment film (E).

Abstract: A film attaching jig (III) is used in a method for fabricating a lens array to attach a pressure-sensitive adhesive optical film (D) onto an adhesion area (i) and has: (1) a main body having a first end face in a z?-direction being an end face to be directed to a film-containing base plate (II) and a lens array main unit (I); (2) a film holding projection that is provided on the first end face and protrudes in parallel to the z?-direction toward the film-containing base plate (II) and the lens array main unit (I), the film holding projection having a holding area (iii) at its front end face for temporarily holding the pressure-sensitive adhesive optical film (D); and (3) a pair of pins or holes disposed on the first end face in parallel to the z?-direction, and provided at opposite positions over the film holding projection.

Abstract: A lens array fabrication method for fabricating a lens array includes: receiving pins of a film attaching instrument (jig) in second guide holes of a film-containing base plate; bonding a placement area and an adhesion layer (F); removing the pins; causing a detachment between a first detachment film (C) and a pressure-sensitive adhesive optical film (D); separating three layers (D) to (F) from two layers (B) and (C); receiving the pins in first guide holes of a lens array main unit; fitting a film holding protrusion in a depression part; bonding the film (D) to a bonding region (i); removing the pins; and causing a detachment between the film (D) and a second detachment film (E).

Abstract: Disclosed is an optical connection component manufacturing apparatus that manufactures an optical connection component in which a refractive index matching body is attached to a front end face of an optical fiber. A movement mechanism, an X-axis motor, and a movement stage that move the optical fiber set a first interval at which a refractive index matching liquid held on a holding face is adsorbed, by a Coulomb force according to the charging, onto a front end face of the optical fiber charged by a static electricity generating device and then enlarge the interval. The static electricity generating device applies electric charge to the optical fiber in the state of the first interval and continuously applies electric charge to the optical fiber even after the interval starts to be enlarged.

Abstract: Disclosed is an optical connection component manufacturing apparatus that manufactures an optical connection component in which a refractive index matching body is attached to a front end face of an optical fiber. The optical connection component manufacturing apparatus includes: a holding unit that includes a holding face holding a refractive index matching liquid including the refractive index matching body; a dispenser that supplies the refractive index matching liquid to the holding face; and a static electricity generating device that charges the optical fiber so that the refractive index matching liquid held on the holding face is adsorbed onto the front end face of the optical fiber, wherein the holding face has an outer peripheral edge connected in a curved line.

Abstract: Disclosed is an optical connection component manufacturing apparatus that manufactures an optical connection component in which a refractive index matching body is attached to a front end face of an optical fiber. The optical connection component manufacturing apparatus includes: a holding unit that includes a holding face holding a refractive index matching liquid including the refractive index matching body; a dispenser that supplies the refractive index matching liquid to the holding face; and a static electricity generating device that charges the optical fiber so that the refractive index matching liquid held on the holding face is adsorbed onto the front end face of the optical fiber, wherein the holding face has an outer peripheral edge connected in a curved line.

Abstract: Disclosed is an optical connection component manufacturing apparatus that manufactures an optical connection component in which a refractive index matching body is attached to a front end face of an optical fiber. The optical connection component manufacturing apparatus includes: a holding unit that includes a holding face holding a refractive index matching liquid including the refractive index matching body; a dispenser that supplies the refractive index matching liquid to the holding face; and a static electricity generating device that charges the optical fiber so that the refractive index matching liquid held on the holding face is adsorbed onto the front end face of the optical fiber, wherein the holding face has an outer peripheral edge connected in a curved line.

Abstract: Disclosed is an optical connection component manufacturing apparatus that manufactures an optical connection component in which a refractive index matching body is attached to a front end face of an optical fiber. A movement mechanism, an X-axis motor, and a movement stage that move the optical fiber set a first interval at which a refractive index matching liquid held on a holding face is adsorbed, by a Coulomb force according to the charging, onto a front end face of the optical fiber charged by a static electricity generating device and then enlarge the interval. The static electricity generating device applies electric charge to the optical fiber in the state of the first interval and continuously applies electric charge to the optical fiber even after the interval starts to be enlarged.

Abstract: A lens array fabrication method for fabricating a lens array includes: receiving pins (16) of a film attaching instrument (jig) in second guide holes (10) of a film-containing base plate; bonding a placement area and an adhesion layer (F); removing the pins (16); causing a detachment between a first detachment film (C) and a pressure-sensitive adhesive optical film (D); separating three layers (D) to (F) from two layers (B) and (C); receiving the pins (16) in first guide holes (7) of a lens array main unit; fitting a film holding protrusion (15) in a depression part (6); bonding the film (D) to a bonding region (i); removing the pins (16); and causing a detachment between the film (D) and a second detachment film (E).