Patents by Inventor Nobuhiro Hidaka

Nobuhiro Hidaka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11107719
    Abstract: An electrostatic chuck device includes: a base having one principal surface which is a placing surface on which a plate-shaped sample is placed, wherein the base is made from a sintered compact of ceramic particles, which include silicon carbide particles and aluminum oxide particles, as a forming material; and an electrostatic attraction electrode which is provided on a surface of the base on the side opposite to the placing surface of the base, or in the interior of the base, in which the volume resistivity value of the sintered compact is 0.5×1015 ?cm or more in the entire range from 24° C. to 300° C., a graph which shows the relationship of the volume resistivity value of the sintered compact to a temperature at which the volume resistivity value of the sintered compact is measured has a maximum value in the range from 24° C. to 300° C., and the amount of metal impurities in the sintered compact other than aluminum and silicon in the sintered compact is 100 ppm or less.
    Type: Grant
    Filed: January 12, 2017
    Date of Patent: August 31, 2021
    Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
    Inventors: Nobuhiro Hidaka, Hironori Kugimoto, Mamoru Kosakai
  • Publication number: 20210114937
    Abstract: A ceramic composite sintered body, including: a metal oxide as a main phase, and silicon carbide as a sub-phase, in which crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and an average crystal grain size of the silicon carbide dispersed at the crystal grain boundaries of the metal oxide is 0.30 ?m or less.
    Type: Application
    Filed: March 22, 2019
    Publication date: April 22, 2021
    Applicant: Sumitomo Osaka Cement Co., Ltd.
    Inventors: Nobuhiro HIDAKA, Naoto KIMURA
  • Publication number: 20210013081
    Abstract: A ceramic substrate made of a dielectric material including silicon carbide particles, which is used as a forming material, in which the number of the silicon carbide particles per unit area on the surface of the substrate is smaller than the number of the silicon carbide particles per unit area in a cross section of the substrate.
    Type: Application
    Filed: March 28, 2019
    Publication date: January 14, 2021
    Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
    Inventors: Mamoru KOSAKAI, Nobuhiro HIDAKA, Naoto KIMURA, Hironori KUGIMOTO
  • Publication number: 20210013082
    Abstract: This electrostatic chuck device (1) includes a base (11) having one main surface serving as a mounting surface (19) on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction (13) provided on the side opposite to the mounting surface (19) in the base (11), in which the base (11) consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.
    Type: Application
    Filed: March 26, 2019
    Publication date: January 14, 2021
    Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
    Inventors: Nobuhiro HIDAKA, Naoto KIMURA
  • Publication number: 20200211884
    Abstract: A composite sintered body, wherein the composite sintered body consists of ceramic composite sintered body, the ceramic composite sintered body comprises aluminum oxide as a main phase, and silicon carbide as a sub-phase, in which the composite sintered body has mullite in crystal grains of the aluminum oxide.
    Type: Application
    Filed: June 28, 2018
    Publication date: July 2, 2020
    Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
    Inventors: Nobuhiro HIDAKA, Hironori KUGIMOTO
  • Publication number: 20200027770
    Abstract: A composite sintered body is a ceramic composite sintered body which includes metal oxide which is a main phase, and silicon carbide which is a sub-phase, in which crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and a proportion of the crystal grains of the silicon carbide dispersed in the crystal grains of the metal oxide is 25% or more in an area ratio with respect to a total crystal grains of the silicon carbide.
    Type: Application
    Filed: March 26, 2018
    Publication date: January 23, 2020
    Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
    Inventors: Nobuhiro HIDAKA, Naoto KIMURA
  • Publication number: 20190385884
    Abstract: This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.
    Type: Application
    Filed: February 19, 2018
    Publication date: December 19, 2019
    Inventors: Nobuhiro HIDAKA, Hironori KUGIMOTO
  • Patent number: 10497599
    Abstract: Provided are a corrosion-resistant member; a member for an electrostatic chuck; and a process for producing the corrosion-resistant member. The corrosion-resistant member includes an oxide which includes samarium and aluminum and has a perovskite type structure. The member for an electrostatic chuck includes the corrosion-resistant member. The process for producing a corrosion-resistant member includes: mixing aluminum oxide powder and samarium oxide powder with a solvent to prepare a slurry including the aluminum oxide powder and the samarium oxide powder; drying the slurry to prepare a mixed powder including the aluminum powder and the samarium oxide powder, and molding the mixed powder to prepare a green body; and calcinating the green body to prepare a sintered body.
    Type: Grant
    Filed: August 25, 2015
    Date of Patent: December 3, 2019
    Assignee: SUMITOMO OSAKA CEMENT CO., LTD
    Inventors: Megumi Ootomo, Kentaro Takahashi, Nobuhiro Hidaka, Hironori Kugimoto
  • Publication number: 20190043746
    Abstract: Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.
    Type: Application
    Filed: January 27, 2017
    Publication date: February 7, 2019
    Inventors: Yoshiki YOSHIOKA, Nobuhiro HIDAKA, Hironori KUGIMOTO
  • Publication number: 20190019713
    Abstract: An electrostatic chuck device includes: a base having one principal surface which is a placing surface on which a plate-shaped sample is placed, wherein the base is made from a sintered compact of ceramic particles, which include silicon carbide particles and aluminum oxide particles, as a forming material; and an electrostatic attraction electrode which is provided on a surface of the base on the side opposite to the placing surface of the base, or in the interior of the base, in which the volume resistivity value of the sintered compact is 0.5×1015 ?cm or more in the entire range from 24° C. to 300° C., a graph which shows the relationship of the volume resistivity value of the sintered compact to a temperature at which the volume resistivity value of the sintered compact is measured has a maximum value in the range from 24° C. to 300° C., and the amount of metal impurities in the sintered compact other than aluminum and silicon in the sintered compact is 100 ppm or less.
    Type: Application
    Filed: January 12, 2017
    Publication date: January 17, 2019
    Inventors: Nobuhiro HIDAKA, Hironori KUGIMOTO, Mamoru KOSAKAI
  • Publication number: 20170294331
    Abstract: Provided are a corrosion-resistant member in which, in a case where the corrosion-resistant member is used as a member for an electrostatic chuck, an adsorption force of the electrostatic chuck can be made to be strong when an electric field is applied and a residual adsorption force of the electrostatic chuck can be made to be weak when the application of the electric field is stopped; a member for an electrostatic chuck; and a process for producing a corrosion-resistant member. The corrosion-resistant member includes an oxide which includes samarium and aluminum and has a perovskite type structure. The member for an electrostatic chuck includes the corrosion-resistant member according to the present invention.
    Type: Application
    Filed: August 25, 2015
    Publication date: October 12, 2017
    Inventors: Megumi OOTOMO, Kentaro TAKAHASHI, Nobuhiro HIDAKA, Hironori KUGIMOTO
  • Publication number: 20140245724
    Abstract: Provided are an exhaust purification catalyst which purifies an exhaust gas discharged from an internal combustion engine and in which high catalytic activity at a low temperature and high durability at a high temperature are compatible with each other, and an exhaust emission control device for the internal combustion engine in which the exhaust purification catalyst is used. The exhaust purification catalyst is a catalyst in which a noble metal particle is carried on a surface of a silicon carbide particle. The catalyst is a noble-metal-carrying silicon carbide particle (1) in which a noble metal particle (3) is carried on a surface of a silicon carbide particle (2) in a state of being coated with an oxide layer (4).
    Type: Application
    Filed: August 24, 2012
    Publication date: September 4, 2014
    Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
    Inventors: Masamichi Tanaka, Nobuhiro Hidaka, Katsunori Hanamura
  • Patent number: 8277581
    Abstract: Nickel-iron-zinc alloy nanoparticles of the present invention are in the form of tabular particles having a thickness of 1 ?m or less and an aspect ratio of 2 or more, wherein the (220) plane which is the crystal plane of the face-centered cubic lattice is oriented on the tabular surface of the particles.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: October 2, 2012
    Assignee: Sumitomo Osaka Cement Co., Ltd.
    Inventors: Masayuki Ishizuka, Nobuhiro Hidaka
  • Publication number: 20110165420
    Abstract: Nickel-iron-zinc alloy nanoparticles of the present invention are in the form of tabular particles having a thickness of 1 ?m or less and an aspect ratio of 2 or more, wherein the (220) plane which is the crystal plane of the face-centered cubic lattice is oriented on the tabular surface of the particles.
    Type: Application
    Filed: April 10, 2008
    Publication date: July 7, 2011
    Applicant: Sumitomo Osaka Cement Co., Ltd.
    Inventors: Masayuki Ishizuka, Nobuhiro Hidaka
  • Publication number: 20110017501
    Abstract: This invention provides a composite material useful for size reduction of electronic components and circuit boards mounted on electronic equipment and exhibiting a low magnetic loss (tan ?), and a manufacturing method thereof. The composite material contains an insulating material and particulates dispersed in this insulating material, the particulates being previously coated with an insulating material having substantially the same composition as that of the coating insulating material. The particulates consist of an organic or inorganic substance and preferably have a flat shape. The insulating material may be an insulating material commonly used in the field of electronic components. The composite material of the invention is preferably manufactured by a manufacturing method in which the particulates are previously coated with an insulating material and dispersed in an insulating material having substantially the same composition as that of the coating insulating material.
    Type: Application
    Filed: March 26, 2009
    Publication date: January 27, 2011
    Inventors: Tadahiro Ohmi, Akinobu Teramoto, Masayuki Ishizuka, Nobuhiro Hidaka, Yasushi Shirakata
  • Publication number: 20100000769
    Abstract: There are provided a composite magnetic body exhibiting a sufficiently low magnetic loss at frequencies of several hundreds of megahertz to several gigahertz, and a method of manufacturing the same. The composite magnetic body contains a magnetic powder dispersed in an insulating material. The magnetic powder is in a spherical shape or an elliptic shape. The composite magnetic body has any one of the following characteristics (a) to (c): (a) the relative magnetic permeability ?r is larger than 1 and the loss tangent tan ? is 0.1 or less, at a frequency of 1 GHz or 500 MHz; (b) the real part ?r? of the complex permeability is more than 10 and the loss tangent tan ? is 0.3 or less, at a frequency of 1.2 GHz or less; and (c) the real part ?r? of the complex permeability is more than 1 at a frequency of 4 GHz or less, and the loss tangent tan ? is 0.1 or less at a frequency of 1 GHz or less.
    Type: Application
    Filed: January 22, 2008
    Publication date: January 7, 2010
    Inventors: Tadahiro Ohmi, Akinobu Teramoto, Masayuki Ishizuka, Nobuhiro Hidaka, Yasushi Shirakata