Patents by Inventor Nobuhiro Kawamata
Nobuhiro Kawamata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20210172978Abstract: Customizable probe cards, probe systems including the same, and related methods. A customizable probe card for testing one or more devices under test (DUTs) comprises a support structure, one or more probe assemblies supporting respective probes, and a probe repositioning assembly. The probe repositioning assembly is configured to facilitate selective adjustment of an orientation of at least one probe relative to the support structure. In examples, a probe system comprises a chuck for supporting a substrate that includes one or more DUTs, a customizable probe card, and a probe card holder. In examples, methods of reconfiguring a customizable probe card comprise utilizing a probe repositioning assembly to reposition the respective probe of at least one probe assembly.Type: ApplicationFiled: November 5, 2020Publication date: June 10, 2021Inventors: Yoichi Funatoko, Nobuhiro Kawamata, Masahiro Sameshima, Masanori Watanabe
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Patent number: 10352870Abstract: Improved wafer-scale testing of optoelectronic devices, such as CMOS image scan devices, is provided. A probe card includes an LED light source corresponding to each device under test in the wafer. The LED light sources provide light from a phosphor illuminated by the LED. A pinhole and lens arrangement is used to collimate the light provided to the devices under test. Uniformity of illumination can be provided by closed loop control of the LED light sources using internal optical signals as feedback signals, in combination with calibration data relating the optical signal values to emitted optical intensity. Uniformity of illumination can be further improved by providing a neutral density filter for each LED light source to improve uniformity from one source to another and/or to improve uniformity of the radiation pattern from each LED light source.Type: GrantFiled: December 7, 2017Date of Patent: July 16, 2019Assignee: FormFactor, Inc.Inventors: Nobuhiro Kawamata, Toshihiro Kasai, Hiromitsu Sasanami, Shigeki Mori
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Publication number: 20180164223Abstract: Improved wafer-scale testing of optoelectronic devices, such as CMOS image scan devices, is provided. A probe card includes an LED light source corresponding to each device under test in the wafer. The LED light sources provide light from a phosphor illuminated by the LED. A pinhole and lens arrangement is used to collimate the light provided to the devices under test. Uniformity of illumination can be provided by closed loop control of the LED light sources using internal optical signals as feedback signals, in combination with calibration data relating the optical signal values to emitted optical intensity. Uniformity of illumination can be further improved by providing a neutral density filter for each LED light source to improve uniformity from one source to another and/or to improve uniformity of the radiation pattern from each LED light source.Type: ApplicationFiled: December 7, 2017Publication date: June 14, 2018Inventors: Nobuhiro Kawamata, Toshihiro Kasai, Hiromitsu Sasanami, Shigeki Mori
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Patent number: 7898242Abstract: A probe card assembly can include an insert holder configured to hold a probe insert, which can include probes disposed in a particular configuration for probing a device to be tested. The probe card assembly can provide an electrical interface to a tester that can control testing of the device, and while attached to the probe card assembly, the insert holder can hold the probe insert such that the probe insert is electrically connected to electrical paths within the probe card assembly that are part of the interface to the tester. The insert holder can be detached from the probe card assembly. The probe insert of the probe card assembly can be replaced by detaching the insert holder, replacing the probe insert with a new probe insert, and then reattaching the insert holder to the probe card assembly. The probe insert and holder can be integrally formed and comprise a single structure that can be detached from a probe card assembly and replaced with a different probe insert and holder.Type: GrantFiled: March 3, 2009Date of Patent: March 1, 2011Assignee: FormFactor, Inc.Inventors: Benjamin N. Eldridge, Carl V. Reynolds, Nobuhiro Kawamata, Takao Saeki
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Patent number: 7843202Abstract: Methods and apparatus for testing semiconductor devices are provided herein. In some embodiments, an assembly for testing semiconductor devices can include a probe card assembly; and a thermal barrier disposed proximate an upper surface of the probe card assembly, the thermal barrier can restrict thermal transfer between tester side boundary conditions and portions of the probe card assembly disposed beneath the thermal barrier.Type: GrantFiled: September 28, 2007Date of Patent: November 30, 2010Assignee: FormFactor, Inc.Inventors: Eric D. Hobbs, Nobuhiro Kawamata, Andrew W. McFarland, Carl V. Reynolds, Yoichi Urakawa
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Publication number: 20090160432Abstract: A probe card assembly can include an insert holder configured to hold a probe insert, which can include probes disposed in a particular configuration for probing a device to be tested. The probe card assembly can provide an electrical interface to a tester that can control testing of the device, and while attached to the probe card assembly, the insert holder can hold the probe insert such that the probe insert is electrically connected to electrical paths within the probe card assembly that are part of the interface to the tester. The insert holder can be detached from the probe card assembly. The probe insert of the probe card assembly can be replaced by detaching the insert holder, replacing the probe insert with a new probe insert, and then reattaching the insert holder to the probe card assembly. The probe insert and holder can be integrally formed and comprise a single structure that can be detached from a probe card assembly and replaced with a different probe insert and holder.Type: ApplicationFiled: March 3, 2009Publication date: June 25, 2009Inventors: Benjamin N. Eldridge, Carl V. Reynolds, Nobuhiro Kawamata, Takao Saeki
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Patent number: 7498825Abstract: A probe card assembly can include an insert holder configured to hold a probe insert, which can include probes disposed in a particular configuration for probing a device to be tested. The probe card assembly can provide an electrical interface to a tester that can control testing of the device, and while attached to the probe card assembly, the insert holder can hold the probe insert such that the probe insert is electrically connected to electrical paths within the probe card assembly that are part of the interface to the tester. The insert holder can be detached from the probe card assembly. The probe insert of the probe card assembly can be replaced by detaching the insert holder, replacing the probe insert with a new probe insert, and then reattaching the insert holder to the probe card assembly. The probe insert and holder can be integrally formed and comprise a single structure that can be detached from a probe card assembly and replaced with a different probe insert and holder.Type: GrantFiled: December 21, 2005Date of Patent: March 3, 2009Assignee: FormFactor, Inc.Inventors: Benjamin N. Eldridge, Carl V. Reynolds, Nobuhiro Kawamata, Takao Saeki
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Publication number: 20070007977Abstract: A probe card assembly can include an insert holder configured to hold a probe insert, which can include probes disposed in a particular configuration for probing a device to be tested. The probe card assembly can provide an electrical interface to a tester that can control testing of the device, and while attached to the probe card assembly, the insert holder can hold the probe insert such that the probe insert is electrically connected to electrical paths within the probe card assembly that are part of the interface to the tester. The insert holder can be detached from the probe card assembly. The probe insert of the probe card assembly can be replaced by detaching the insert holder, replacing the probe insert with a new probe insert, and then reattaching the insert holder to the probe card assembly. The probe insert and holder can be integrally formed and comprise a single structure that can be detached from a probe card assembly and replaced with a different probe insert and holder.Type: ApplicationFiled: December 21, 2005Publication date: January 11, 2007Applicant: FORMFACTOR, INC.Inventors: Benjamin Eldridge, Carl Reynolds, Nobuhiro Kawamata, Takao Saeki