Patents by Inventor Nobuhiro MICHIBAYASHI

Nobuhiro MICHIBAYASHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11780946
    Abstract: An alternating copolymer including a structural unit (a0-1) represented by general formula (a0-1) and a structural unit (a0-2) represented by general formula (a0-2) in which Rp01 represents a hydrogen atom or the like; Vp01 represents a single bond or a divalent linking group; Rp02 and Rp03 each independently represents a hydrocarbon group which may have a substituent, or Rp02 and Rp03 are mutually bonded to form a ring; Rp04 represents a hydrogen atom, a C1-C5 alkyl group or a C1-C5 halogenated alkyl group; Rp05 represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a cyano group or a hydroxy group; Rp06 represents a linear or branched aliphatic hydrocarbon group; and m represents an integer of 0 to 4
    Type: Grant
    Filed: January 19, 2021
    Date of Patent: October 10, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: Akiyoshi Yamazaki, Daisuke Kawana, Yoshitaka Komuro, Masatoshi Arai, Nobuhiro Michibayashi, Takatoshi Inari
  • Patent number: 11762288
    Abstract: A resist composition that generates an acid upon exposure and whose solubility in a developing solution is changed by action of an acid.
    Type: Grant
    Filed: December 10, 2020
    Date of Patent: September 19, 2023
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Hiroto Yamazaki, Seiji Todoroki, Masahiro Shiosaki, Nobuhiro Michibayashi
  • Patent number: 11693316
    Abstract: A resist composition including a resin component having a constitutional unit derived from a compound represented by General Formula (a01-1) and a constitutional unit derived from a compound represented by General Formula (a02-1), and an acid generator component composed of an anion moiety and a cation moiety. In General Formula (a01-1), W1 represents a polymerizable group-containing group, Ct represents a tertiary carbon atom, R11 represents an unsaturated hydrocarbon group which may have a substituent, R12 and R13 represent a chain saturated hydrocarbon group which may have a substituent, and a carbon atom at an ?-position of Ct constitutes a carbon-carbon unsaturated bond.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: July 4, 2023
    Assignee: TOKYO OHKA KOGYO CO., LTD.
    Inventors: KhanhTin Nguyen, Masatoshi Arai, Nobuhiro Michibayashi
  • Patent number: 11256169
    Abstract: A resist composition containing a resin component having a structural unit containing a group which is dissociated under the action of an acid and compound represented by the general formula (bd1). In the formula (bd1), Rx1 to Rx4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, Ry1 to Ry2 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, and Rz1 to Rz4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure.
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: February 22, 2022
    Assignee: Tokyo Ohka Kogyo Co., Ltd.
    Inventors: Takuya Ikeda, Nobuhiro Michibayashi, Mari Murata, Hiroto Yamazaki, Masatoshi Arai, Yoshitaka Komuro
  • Publication number: 20210230332
    Abstract: An alternating copolymer including a structural unit (a0-1) represented by general formula (a0-1) and a structural unit (a0-2) represented by general formula (a0-2) in which Rp01 represents a hydrogen atom or the like; Vp01 represents a single bond or a divalent linking group; Rp02 and Rp03 each independently represents a hydrocarbon group which may have a substituent, or Rp02 and Rp03 are mutually bonded to form a ring; Rp04 represents a hydrogen atom, a C1-C5 alkyl group or a C1-C5 halogenated alkyl group; Rp05 represents an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a cyano group or a hydroxy group; Rp06 represents a linear or branched aliphatic hydrocarbon group; and m represents an integer of 0 to 4
    Type: Application
    Filed: January 19, 2021
    Publication date: July 29, 2021
    Inventors: Akiyoshi YAMAZAKI, Daisuke KAWANA, Yoshitaka KOMURO, Masatoshi ARAI, Nobuhiro MICHIBAYASHI, Takatoshi INARI
  • Publication number: 20210200088
    Abstract: A resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution under action of acid, a total amount of a basic component including a compound represented by general formula (d0) and an acid-generator component is 25 to 60 parts by weight relative to 100 parts by weight of a base material component. In formula (d0), Rd0 represents a monovalent organic group; Xd0 represents —O—, —C(?O)—, —O—C(?O)—, —C(?O)—O—, —S— or —SO2—; Yd0 represents a single bond or a divalent hydrocarbon group which may have a substituent; Mm+ represents a m-valent organic cation; and m represents an integer of 1 or more Rd0-Xd0-Yd0-COO?(Mm?)1/m??(d0).
    Type: Application
    Filed: December 21, 2020
    Publication date: July 1, 2021
    Inventors: Toshiaki YATSUNAMI, Takaya MAEHASHI, Masahiro SHIOSAKI, Hiroshi GOHARA, Seiji TODOROKI, Koshi ONISHI, KhanhTin NGUYEN, Nobuhiro MICHIBAYASHI, Takuya IKEDA
  • Publication number: 20210200089
    Abstract: A resist composition is provided that generates an acid upon exposure and whose solubility in a developing solution is changed by action of an acid.
    Type: Application
    Filed: December 10, 2020
    Publication date: July 1, 2021
    Inventors: Hiroto YAMAZAKI, Seiji TODOROKI, Masahiro SHIOSAKI, Nobuhiro MICHIBAYASHI
  • Publication number: 20210191268
    Abstract: A resist composition including a resin component having a constitutional unit derived from a compound represented by General Formula (a01-1) and a constitutional unit derived from a compound represented by General Formula (a02-1), and an acid generator component composed of an anion moiety and a cation moiety. In General Formula (a01-1), W1 represents a polymerizable group-containing group, Ct represents a tertiary carbon atom, R11 represents an unsaturated hydrocarbon group which may have a substituent, R12 and R13 represent a chain saturated hydrocarbon group which may have a substituent, and a carbon atom at an ?-position of Ct constitutes a carbon-carbon unsaturated bond.
    Type: Application
    Filed: December 14, 2020
    Publication date: June 24, 2021
    Inventors: KhanhTin NGUYEN, Masatoshi ARAI, Nobuhiro MICHIBAYASHI
  • Publication number: 20200183273
    Abstract: A resist composition including a base material component (A) whose solubility in a developing solution is changed due to the action of an acid, and a compound (D0) formed of an anion moiety and a cation moiety which is represented by Formula (d0), in which the cation moiety of the compound (D0) has a Log P value of less than 7.7. In the formula, Mm+ represents an m-valent organic cation, Rd0 represents a substituent, p represents an integer of 0 to 3, q represents an integer of 0 to 3, n represents an integer of 2 or greater, and a relationship of “n+p?(q×2)+5” is satisfied.
    Type: Application
    Filed: November 18, 2019
    Publication date: June 11, 2020
    Inventors: KhanhTin NGUYEN, Mari MURATA, Masatoshi ARAI, Nobuhiro MICHIBAYASHI
  • Publication number: 20190361346
    Abstract: A resist composition containing a resin component having a structural unit containing a group which is dissociated under the action of an acid and compound represented by the general formula (bd1). In the formula (bd1), Rx1 to Rx4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, Ry1 to Ry2 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, and Rz1 to Rz4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure.
    Type: Application
    Filed: May 23, 2019
    Publication date: November 28, 2019
    Inventors: Takuya IKEDA, Nobuhiro MICHIBAYASHI, Mari MURATA, Hiroto YAMAZAKI, Masatoshi ARAI, Yoshitaka KOMURO